Inventor · disambiguated record
Hiroshi Ekko
Also filed as: EKKO HIROSHI
3 granted patents·3 pending applications·3 citations·filing 2007–2024
53Inventor score
Top patents by PatentIndex Score
6 records- 0175US10131992B2Substrate processing apparatus, method of controlling substrate processing apparatus, method of maintaining substrate processing apparatus, and recording mediumHITACHI INT ELECTRIC INC·Filed 2013·Granted Nov 20, 2018·2 cites·10 claims
- 0266US2024319707A1Substrate processing apparatus, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2024·Application pending·0 cites
- 0337US9690879B2Substrate processing apparatus, method of manufacturing semiconductor device, and method of generating recipeHITACHI INT ELECTRIC INC·Filed 2013·Granted Jun 27, 2017·0 cites·3 claims
- 0434US8806370B2Substrate processing apparatusNOGAMI SHIGEKI·Filed 2007·Granted Aug 12, 2014·1 cites·8 claims
- 0533US2009114346A1Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2008·Application pending·0 cites
- 0631US2009020408A1Substrate Processing Method and Substrate Processing ApparatusHITACHI INT ELECTRIC INC·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →