Inventor · disambiguated record
Hirofumi Haga
Also filed as: HAGA HIROFUMI
4 granted patents·5 citations·filing 2015–2019
62Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0174US10276405B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Apr 30, 2019·3 cites·3 claims
- 0268US9984907B2Evacuation method and vacuum processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted May 29, 2018·2 cites·7 claims
- 0357US10861675B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Dec 8, 2020·0 cites·3 claims
- 0449US10204763B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2015·Granted Feb 12, 2019·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →