Inventor · disambiguated record
Hiroto Horikawa
Also filed as: HORIKAWA HIROTO
7 granted patents·3 pending applications·207 citations·filing 1997–2006
87Inventor score
Top patents by PatentIndex Score
10 records- 0189US6721034B1Stage unit, drive table, and scanning exposure apparatus using the sameNIKON CORP·Filed 1999·Granted Apr 13, 2004·90 cites·77 claims
- 0288US5991005AStage apparatus and exposure apparatus having the sameNIKON CORP·Filed 1997·Granted Nov 23, 1999·70 cites·26 claims
- 0379US6262797B1Stage unit, drive table, and scanning exposure apparatus using the sameNIKON CORP·Filed 2000·Granted Jul 17, 2001·17 cites·19 claims
- 0467US7466396B2Lithography apparatus and method utilizing pendulum interferometer systemNIKON CORP·Filed 2006·Granted Dec 16, 2008·2 cites·56 claims
- 0564US7081946B2Holding apparatus, holding method, exposure apparatus and device manufacturing methodNIKON CORP·Filed 2003·Granted Jul 25, 2006·8 cites·45 claims
- 0653US6124923AStage unit, drive table, and scanning exposure apparatus using the sameNIKON CORP·Filed 1999·Granted Sep 26, 2000·13 cites·36 claims
- 0748US2006146312A1Holding apparatus, holding method, exposure apparatus and device manufacturing methodNIKON CORP·Filed 2006·Application pending·0 cites
- 0843US6211946B1Stage unit, drive table, and scanning exposure apparatus using the sameNIKON CORP·Filed 1999·Granted Apr 3, 2001·7 cites·19 claims
- 0942US2007030467A1Exposure apparatus, exposure method, and device fabricating methodNIKON CORP·Filed 2006·Application pending·0 cites
- 1037US2007258068A1Exposure Apparatus, Exposure Method, and Device Fabricating MethodHORIKAWA HIROTO·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →