Inventor · disambiguated record
Hiroki Kawada
Also filed as: KAWADA HIROKI
61 granted patents·1 pending application·523 citations·filing 1994–2020
98Inventor score
Top patents by PatentIndex Score
62 records- 0197US9824938B2Charged particle beam device and inspection deviceHITACHI HIGH TECH CORP·Filed 2015·Granted Nov 21, 2017·20 cites·15 claims
- 0296US7366620B2Evaluation method of fine pattern feature, its equipment, and method of semiconductor device fabricationHITACHI HIGH TECH CORP·Filed 2005·Granted Apr 29, 2008·30 cites·15 claims
- 0394US5536359ASemiconductor device manufacturing apparatus and method with optical monitoring of state of processing chamberHITACHI LTD·Filed 1994·Granted Jul 16, 1996·86 cites·26 claims
- 0493US7230723B2High-accuracy pattern shape evaluating method and apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Jun 12, 2007·20 cites·7 claims
- 0592US7187345B2Image forming method and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Mar 6, 2007·14 cites·6 claims
- 0691US7269287B2Method and apparatus for measuring dimension using electron microscopeHITACHI HIGH TECH CORP·Filed 2006·Granted Sep 11, 2007·23 cites·6 claims
- 0791US7049589B2Pattern inspection methodHITACHI HIGH TECH CORP·Filed 2004·Granted May 23, 2006·63 cites·8 claims
- 0890US7807980B2Charged particle beam apparatus and methods for capturing images using the sameHITACHI HIGH TECH CORP·Filed 2006·Granted Oct 5, 2010·11 cites·7 claims
- 0990US7476857B2Tool-to-tool matching control method and its system for scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2006·Granted Jan 13, 2009·10 cites·28 claims
- 1090US7408155B2Measuring method and its apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Aug 5, 2008·16 cites·10 claims
- 1189US10184790B2Pattern measurement method and pattern measurement deviceHITACHI HIGH TECH CORP·Filed 2015·Granted Jan 22, 2019·6 cites·12 claims
- 1289US8003940B2Tool-to-tool matching control method and its system for scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2009·Granted Aug 23, 2011·9 cites·7 claims
- 1389US7817105B2Image forming method and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Oct 19, 2010·9 cites·19 claims
- 1489US7408154B2Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopesHITACHI HIGH TECH CORP·Filed 2005·Granted Aug 5, 2008·12 cites·13 claims
- 1588US8300919B2Apparatus for data analysisYAMAGUCHI ATSUKO·Filed 2009·Granted Oct 30, 2012·22 cites·12 claims
- 1688US7619751B2High-accuracy pattern shape evaluating method and apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Nov 17, 2009·9 cites·20 claims
- 1788US7154090B2Method for controlling charged particle beam, and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Dec 26, 2006·9 cites·8 claims
- 1887US7399964B2Electron microscope, measuring method using the same, electron microscope system, and method for controlling the systemHITACHI HIGH TECH CORP·Filed 2005·Granted Jul 15, 2008·11 cites·10 claims
- 1986US7420168B2Scanning electron microscope and CD measurement calibration standard specimenHITACHI HIGH TECH CORP·Filed 2007·Granted Sep 2, 2008·8 cites·11 claims
- 2085US7361898B2Scanning electron microscope and CD measurement calibration standard specimenHITACHI HIGH TECH CORP·Filed 2005·Granted Apr 22, 2008·8 cites·9 claims
- 2183US7460714B2Method and apparatus for measuring dimension using electron microscopeHITACHI HIGH TECH CORP·Filed 2007·Granted Dec 2, 2008·10 cites·15 claims
- 2282US7910886B2Sample dimension measuring method and scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2007·Granted Mar 22, 2011·6 cites·7 claims
- 2381US7405835B2High-accuracy pattern shape evaluating method and apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Jul 29, 2008·5 cites·18 claims
- 2479US7164127B2Scanning electron microscope and a method for evaluating accuracy of repeated measurement using the sameHITACHI HIGH TECH CORP·Filed 2004·Granted Jan 16, 2007·16 cites·17 claims
- 2578US9658063B2Method and device for line pattern shape evaluationHITACHI HIGH TECH CORP·Filed 2014·Granted May 23, 2017·3 cites·18 claims
- 2678US6995370B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2004·Granted Feb 7, 2006·12 cites·8 claims
- 2775US9702695B2Image processing device, charged particle beam device, charged particle beam device adjustment sample, and manufacturing method thereofKAWADA HIROKI·Filed 2011·Granted Jul 11, 2017·5 cites·7 claims
- 2875US7659508B2Method for measuring dimensions of sample and scanning electron microscopeHITACHI LTD·Filed 2002·Granted Feb 9, 2010·11 cites·11 claims
- 2974US8502144B2Tool-to-tool matching control method and its system for scanning electron microscopeOOSAKI MAYUKA·Filed 2011·Granted Aug 6, 2013·3 cites·9 claims
- 3074US7045782B2Method of measurement accuracy improvement by control of pattern shrinkageHITACHI HIGH TECH CORP·Filed 2004·Granted May 16, 2006·9 cites·11 claims
- 3173US9297649B2Pattern dimension measurement method and charged particle beam apparatusKAWADA HIROKI·Filed 2011·Granted Mar 29, 2016·3 cites·7 claims
- 3272US7511272B2Method for controlling charged particle beam, and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Mar 31, 2009·2 cites·9 claims
- 3371US7375329B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2006·Granted May 20, 2008·2 cites·10 claims
- 3470US9830524B2Method for estimating shape before shrink and CD-SEM apparatusSEKIGUCHI TOMOKO·Filed 2012·Granted Nov 28, 2017·4 cites·13 claims
- 3568US10816333B2Pattern measurement method and pattern measurement deviceHITACHI HIGH TECH CORP·Filed 2016·Granted Oct 27, 2020·1 cites·8 claims
- 3668US7285777B2Sample dimension measuring method and scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2003·Granted Oct 23, 2007·13 cites·13 claims
- 3767US10002743B2Measurement system and measurement methodHITACHI HIGH TECH CORP·Filed 2015·Granted Jun 19, 2018·1 cites·20 claims
- 3867US7605364B2Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscopeHITACHI HIGH TECH CORP·Filed 2007·Granted Oct 20, 2009·1 cites·15 claims
- 3966US9305744B2Measuring method, data processing apparatus and electron microscope using sameHITACHI HIGH TECH CORP·Filed 2012·Granted Apr 5, 2016·2 cites·18 claims
- 4066US7817860B2Method and apparatus for measuring dimension using electron microscopeHITACHI HIGH TECH CORP·Filed 2008·Granted Oct 19, 2010·3 cites·6 claims
- 4165US8362426B2Scanning electron microscope and image signal processing methodHITACHI HIGH TECH CORP·Filed 2006·Granted Jan 29, 2013·1 cites·12 claims
- 4265US8207512B2Charged particle beam apparatus and methods for capturing images using the sameSHISHIDO CHIE·Filed 2010·Granted Jun 26, 2012·1 cites·8 claims
- 4364US8369602B2Length measurement systemHITACHI HIGH TECH CORP·Filed 2008·Granted Feb 5, 2013·3 cites·6 claims
- 4463US8022356B2Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscopeHITACHI HIGH TECH CORP·Filed 2009·Granted Sep 20, 2011·0 cites·10 claims
- 4560US10101150B2Height measurement device and charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2014·Granted Oct 16, 2018·1 cites·11 claims
- 4660US9123504B2Semiconductor inspection device and semiconductor inspection method using the sameYAMAGUCHI ATSUKO·Filed 2010·Granted Sep 1, 2015·1 cites·3 claims
- 4760US6288368B1Vacuum heating furnace with tapered portionHITACHI LTD·Filed 2000·Granted Sep 11, 2001·6 cites·6 claims
- 4857US8080789B2Sample dimension measuring method and scanning electron microscopeNASU OSAMU·Filed 2009·Granted Dec 20, 2011·0 cites·4 claims
- 4956US7288763B2Method of measurement accuracy improvement by control of pattern shrinkageHITACHI HIGH TECH CORP·Filed 2006·Granted Oct 30, 2007·0 cites·5 claims
- 5051US8399832B2Scanning electron microscope and CD measurement calibration standard specimenMIZUNO TAKESHI·Filed 2008·Granted Mar 19, 2013·0 cites·12 claims
Showing the top 50 of 62 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →