Inventor · disambiguated record
Hiroshi Kumada
Also filed as: KUMADA HIROSHI
3 granted patents·130 citations·filing 1994–2017
71Inventor score
Top patents by PatentIndex Score
3 records- 0189US5964962ASubstrate for solar cell and method for producing the same; substrate treatment apparatus; and thin film solar cell and method for producing the sameSHARP KK·Filed 1996·Granted Oct 12, 1999·104 cites·19 claims
- 0254US5500388AHeat treatment process for wafersTOKYO ELECTRON LTD·Filed 1994·Granted Mar 19, 1996·26 cites·13 claims
- 0332US10529608B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2017·Granted Jan 7, 2020·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →