Inventor · disambiguated record
Hideki Lee
Also filed as: LEE HIDEKI
9 granted patents·1,351 citations·filing 1991–1997
93Inventor score
Files withTOKYO ELECTRON LTD9
Top patents by PatentIndex Score
9 records- 0197US5637153AMethod of cleaning reaction tube and exhaustion piping system in heat processing apparatusTOKYO ELECTRON LTD·Filed 1995·Granted Jun 10, 1997·351 cites·16 claims
- 0296US5647945AVacuum processing apparatusTOKYO ELECTRON LTD·Filed 1994·Granted Jul 15, 1997·308 cites·2 claims
- 0395US5616208AVacuum processing apparatus, vacuum processing method, and method for cleaning the vacuum processing apparatusTOKYO ELECTRON LTD·Filed 1994·Granted Apr 1, 1997·239 cites·7 claims
- 0494US5785796AVacuum processing apparatus, vacuum processing method, and method for cleaning the vacuum processing apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Jul 28, 1998·175 cites·23 claims
- 0590US5951772AVacuum processing apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Sep 14, 1999·104 cites·5 claims
- 0689US5525160AFilm deposition processing device having transparent support and transfer pinsTOKYO ELECTRON LTD·Filed 1994·Granted Jun 11, 1996·78 cites·4 claims
- 0785US5380370AMethod of cleaning reaction tubeTOKYO ELECTRON LTD·Filed 1993·Granted Jan 10, 1995·56 cites·8 claims
- 0864US5711815AFilm forming apparatus and film forming methodTOKYO ELECTRON LTD·Filed 1996·Granted Jan 27, 1998·28 cites·10 claims
- 0939US5180692AMethod for the manufacture of boron-containing films by CVD or epitaxial techniques using boron trifluorideTOKYO ELECTRON LTD·Filed 1991·Granted Jan 19, 1993·12 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →