Inventor · disambiguated record
Hiroshi Nagahata
Also filed as: NAGAHATA HIROSHI
8 granted patents·2 pending applications·4 citations·filing 2007–2022
74Inventor score
Top patents by PatentIndex Score
10 records- 0175US9780037B2Method of processing target objectTOKYO ELECTRON LTD·Filed 2016·Granted Oct 3, 2017·2 cites·13 claims
- 0268US9396911B2Determination method, control method, determination apparatus, pattern forming system and programTANAKA KEISUKE·Filed 2012·Granted Jul 19, 2016·2 cites·6 claims
- 0356US10676823B2Processing method and processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Jun 9, 2020·0 cites·16 claims
- 0454US12170193B2Temperature estimation apparatus, plasma processing system, temperature estimation method and temperature estimation programTOKYO ELECTRON LTD·Filed 2021·Granted Dec 17, 2024·0 cites·10 claims
- 0549US12288678B2Substrate processing apparatus and substrate transfer position adjustment methodTOKYO ELECTRON LTD·Filed 2022·Granted Apr 29, 2025·0 cites·19 claims
- 0649US11669079B2Tool health monitoring and classifications with virtual metrology and incoming wafer monitoring enhancementsTOKYO ELECTRON LTD·Filed 2021·Granted Jun 6, 2023·0 cites·21 claims
- 0745US2016300698A1Pattern forming system and substrate processing systemTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
- 0840US8058585B2Plasma processing method, plasma processing apparatus and storage mediumAMEMIYA HIROKI·Filed 2007·Granted Nov 15, 2011·0 cites·13 claims
- 0937US2019318914A1Processing apparatus and method for controlling processing apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 1032US10832891B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2017·Granted Nov 10, 2020·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →