Inventor · disambiguated record
Hiroshi Nagaike
Also filed as: NAGAIKE HIROSHI
25 granted patents·15 pending applications·242 citations·filing 2003–2025
95Inventor score
Top patents by PatentIndex Score
40 records- 0198US8052798B2Particle removal apparatus and method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2009·Granted Nov 8, 2011·47 cites·8 claims
- 0295US7651586B2Particle removal apparatus and method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2004·Granted Jan 26, 2010·52 cites·22 claims
- 0394US8877002B2Internal member of a plasma processing vesselTOKYO ELECTRON LTD·Filed 2013·Granted Nov 4, 2014·7 cites·13 claims
- 0494US7780786B2Internal member of a plasma processing vesselTOKYO ELECTRON LTD·Filed 2003·Granted Aug 24, 2010·51 cites·9 claims
- 0591US8449715B2Internal member of a plasma processing vesselMITSUHASHI KOUJI·Filed 2010·Granted May 28, 2013·9 cites·5 claims
- 0690US8043971B2Plasma processing apparatus, ring member and plasma processing methodTOKYO ELECTRON LTD·Filed 2008·Granted Oct 25, 2011·13 cites·18 claims
- 0789US8337629B2Method for cleaning elements in vacuum chamber and apparatus for processing substratesMORIYA TSUYOSHI·Filed 2012·Granted Dec 25, 2012·7 cites·19 claims
- 0888US10643825B2Particle generation preventing method and vacuum apparatusTOKYO ELECTRON LTD·Filed 2018·Granted May 5, 2020·5 cites·13 claims
- 0987US7560083B2Method for removing water molecules from vacuum chamber, program for executing the method, and storage medium storing the programTOKYO ELECTRON LTD·Filed 2006·Granted Jul 14, 2009·6 cites·12 claims
- 1085US7756599B2Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the programTOKYO ELECTRON LTD·Filed 2005·Granted Jul 13, 2010·10 cites·8 claims
- 1183US7347006B2Processing apparatus and method for removing particles therefromTOKYO ELECTRON LTD·Filed 2005·Granted Mar 25, 2008·9 cites·6 claims
- 1279US8647442B2Cleaning substrate and cleaning methodYAMAZAWA YOHEI·Filed 2012·Granted Feb 11, 2014·2 cites·4 claims
- 1377US10895014B2Processing method and processing apparatus of metal memberTOKYO ELECTRON LTD·Filed 2019·Granted Jan 19, 2021·0 cites·13 claims
- 1473US7976637B2Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for implementing the methodTOKYO ELECTRON LTD·Filed 2007·Granted Jul 12, 2011·3 cites·6 claims
- 1571US8531664B2Particle number measurement methodNAGAIKE HIROSHI·Filed 2011·Granted Sep 10, 2013·2 cites·5 claims
- 1670US11462444B2Substrate container, controller, and abnormality detection methodTOKYO ELECTRON LTD·Filed 2018·Granted Oct 4, 2022·1 cites·20 claims
- 1770US8206513B2Method for cleaning elements in vacuum chamber and apparatus for processing substratesMORIYA TSUYOSHI·Filed 2008·Granted Jun 26, 2012·2 cites·13 claims
- 1869US2009258148A1Method of producing ceramic spray-coated member, program for conducting the method, storage medium and ceramic spray-coated memberTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1968US11158490B2Processing method in processing apparatus using halogen-based gasTOKYO ELECTRON LTD·Filed 2016·Granted Oct 26, 2021·2 cites·12 claims
- 2067US2010068395A1Method of producing ceramic spray-coated member, program for conducting the method, storage medium and ceramic spray-coated memberTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 2165US8137473B2Method for cleaning elements in vacuum chamber and apparatus for processing substratesMORIYA TSUYOSHI·Filed 2004·Granted Mar 20, 2012·7 cites·12 claims
- 2264US2009241992A1Cleaning substrate and cleaning methodTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 2361US8608422B2Particle sticking prevention apparatus and plasma processing apparatusMORIYA TSUYOSHI·Filed 2004·Granted Dec 17, 2013·7 cites·24 claims
- 2458US2006099457A1Method of producing ceramic spray-coated member, program for conducting the method, storage medium and ceramic spray-coated memberTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 2555US8323414B2Particle removal apparatus and method and plasma processing apparatusMORIYA TSUYOSHI·Filed 2011·Granted Dec 4, 2012·0 cites·14 claims
- 2653US2025183101A1Evaluation apparatus, evaluation method, and storage mediumTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 2753US2023245871A1Substrate processing system and particle removal methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 2852US2023134948A1Staining method, microscopic observation method, staining agent and staining kitUNIV NAGOYA CITY PUBLIC UNIV CORP·Filed 2021·Application pending·0 cites
- 2948US8243265B2Method and apparatus for detecting foreign materials and storage mediumMORIYA TSUYOSHI·Filed 2009·Granted Aug 14, 2012·0 cites·9 claims
- 3047US8578952B2Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for implementing the methodNAGAIKE HIROSHI·Filed 2011·Granted Nov 12, 2013·0 cites·6 claims
- 3146US2006162742A1Cleaning method of processing apparatus, program for performing the method, and storage medium for storing the programTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
- 3245US2021066053A1Annular member, substrate processing apparatus and method of controlling substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 3343US2005103275A1Plasma processing apparatus, ring member and plasma processing methodTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 3441US9627184B2Cleaning method of processing apparatus, program for performing the method, and storage medium for storing the programMORIYA TSUYOSHI·Filed 2010·Granted Apr 18, 2017·0 cites·5 claims
- 3539US8172949B2Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the programKUDO TOMOYUKI·Filed 2010·Granted May 8, 2012·0 cites·7 claims
- 3636US2021130955A1Film forming apparatus and film forming methodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 3736US2013056154A1Abnormality detecting unit and abnormality detecting methodNAKAYA MICHIKO·Filed 2012·Application pending·0 cites
- 3836US2020126829A1Maintenance control method of controlling maintenance of processing device and control deviceTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 3935US2017004984A1Substrate transfer apparatus and substrate transfer methodTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
- 4034US2021140044A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →