Inventor · disambiguated record
Hiroyuki Nagasaka
Also filed as: NAGASAKA HIROYUKI
109 granted patents·65 pending applications·924 citations·filing 1997–2021
99Inventor score
Top patents by PatentIndex Score
174 records- 0199US7535550B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2007·Granted May 19, 2009·53 cites·18 claims
- 0299US7483119B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2005·Granted Jan 27, 2009·76 cites·102 claims
- 0399US7268854B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2005·Granted Sep 11, 2007·61 cites·29 claims
- 0498US8891059B2Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating methodNAGASAKA HIROYUKI·Filed 2011·Granted Nov 18, 2014·30 cites·20 claims
- 0598US8004651B2Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating methodNIKON CORP·Filed 2008·Granted Aug 23, 2011·45 cites·37 claims
- 0698US7542128B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2007·Granted Jun 2, 2009·46 cites·23 claims
- 0798US7466392B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2006·Granted Dec 16, 2008·30 cites·20 claims
- 0898US7399979B2Exposure method, exposure apparatus, and method for producing deviceNIKON CORP·Filed 2007·Granted Jul 15, 2008·32 cites·15 claims
- 0998US7098991B2Exposure method, exposure apparatus, and method for manufacturing deviceNIKON CORP·Filed 2004·Granted Aug 29, 2006·142 cites·35 claims
- 1097US9013675B2Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating methodNISHII YASUFUMI·Filed 2012·Granted Apr 21, 2015·32 cites·18 claims
- 1197US8134685B2Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating methodNISHII YASUFUMI·Filed 2008·Granted Mar 13, 2012·43 cites·67 claims
- 1297US7515246B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2006·Granted Apr 7, 2009·26 cites·49 claims
- 1396US7453550B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2007·Granted Nov 18, 2008·35 cites·40 claims
- 1494US7697110B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2005·Granted Apr 13, 2010·19 cites·9 claims
- 1592US9348239B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2014·Granted May 24, 2016·3 cites·26 claims
- 1692US7852456B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2005·Granted Dec 14, 2010·12 cites·29 claims
- 1791US7714982B2Exposure apparatus, exposure method, and device manufacturing methodNIKON CORP·Filed 2007·Granted May 11, 2010·11 cites·35 claims
- 1890US9977352B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2016·Granted May 22, 2018·2 cites·16 claims
- 1990US7932991B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2006·Granted Apr 26, 2011·6 cites·30 claims
- 2089US9529273B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2015·Granted Dec 27, 2016·2 cites·26 claims
- 2189US9134621B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2013·Granted Sep 15, 2015·3 cites·17 claims
- 2289US8854601B2Projection optical system, exposure apparatus, and exposure methodOMURA YASUHIRO·Filed 2011·Granted Oct 7, 2014·8 cites·21 claims
- 2389US8717533B2Exposure apparatus, exposure method, and method for producing deviceNAGASAKA HIROYUKI·Filed 2007·Granted May 6, 2014·11 cites·13 claims
- 2489US7705968B2Plate member, substrate holding device, exposure apparatus and method, and device manufacturing methodNIKON CORP·Filed 2006·Granted Apr 27, 2010·13 cites·39 claims
- 2588US7508490B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2006·Granted Mar 24, 2009·6 cites·66 claims
- 2687US7855777B2Exposure apparatus and method for manufacturing deviceNIKON CORP·Filed 2007·Granted Dec 21, 2010·6 cites·14 claims
- 2787US7379157B2Exposure apparatus and method for manufacturing deviceNIKON CORPROATION·Filed 2006·Granted May 27, 2008·9 cites·28 claims
- 2886US9097988B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2014·Granted Aug 4, 2015·2 cites·16 claims
- 2986US8721803B2Cleaning liquid, cleaning method, liquid generating apparatus, exposure apparatus, and device fabricating methodNAGASAKA HIROYUKI·Filed 2011·Granted May 13, 2014·4 cites·8 claims
- 3086US7932994B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2006·Granted Apr 26, 2011·8 cites·9 claims
- 3185US9019467B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted Apr 28, 2015·2 cites·35 claims
- 3285US8218127B2Exposure apparatus and device manufacturing methodNAGASAKA HIROYUKI·Filed 2009·Granted Jul 10, 2012·4 cites·45 claims
- 3385US7914972B2Exposure method and device manufacturing methodNIKON CORP·Filed 2005·Granted Mar 29, 2011·7 cites·22 claims
- 3484US9360763B2Projection optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2014·Granted Jun 7, 2016·4 cites·16 claims
- 3582US9778580B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2016·Granted Oct 3, 2017·1 cites·36 claims
- 3682US9310696B2Projection optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2014·Granted Apr 12, 2016·3 cites·29 claims
- 3781US9746781B2Exposure apparatus and method for producing deviceNIKON CORP·Filed 2014·Granted Aug 29, 2017·2 cites·54 claims
- 3881US8064037B2Immersion exposure apparatus and device manufacturing method with no liquid recovery during exposureNAGASAKA HIROYUKI·Filed 2006·Granted Nov 22, 2011·4 cites·27 claims
- 3980US9285684B2Exposure method, exposure apparatus, and method for producing deviceNIKON CORP·Filed 2013·Granted Mar 15, 2016·1 cites·31 claims
- 4080US8698998B2Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing deviceNAGASAKA HIROYUKI·Filed 2007·Granted Apr 15, 2014·4 cites·29 claims
- 4179US8054447B2Exposure apparatus, exposure method, method for producing device, and optical partNIKON CORP·Filed 2004·Granted Nov 8, 2011·11 cites·37 claims
- 4279US8027020B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2007·Granted Sep 27, 2011·5 cites·37 claims
- 4377US8064044B2Exposure apparatus, exposure method, and device producing methodNAGASAKA HIROYUKI·Filed 2004·Granted Nov 22, 2011·10 cites·28 claims
- 4477US7916270B2Exposure apparatus, exposure method, and device manufacturing methodNIKON CORP·Filed 2007·Granted Mar 29, 2011·4 cites·22 claims
- 4576US9429851B2Projection optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2013·Granted Aug 30, 2016·2 cites·26 claims
- 4676US8169591B2Exposure apparatus, exposure method, and method for producing deviceOWA SOICHI·Filed 2005·Granted May 1, 2012·4 cites·38 claims
- 4774US9588436B2Exposure apparatus, exposure method, and device producing methodNAGASAKA HIROYUKI·Filed 2011·Granted Mar 7, 2017·1 cites·16 claims
- 4874US9239524B2Exposure condition determination method, exposure method, exposure apparatus, and device manufacturing method involving detection of the situation of a liquid immersion regionKIDA YOSHIKI·Filed 2006·Granted Jan 19, 2016·4 cites·48 claims
- 4974US7580114B2Exposure apparatus and method for manufacturing deviceNIKON CORP·Filed 2007·Granted Aug 25, 2009·2 cites·20 claims
- 5074US2019121244A1Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2018·Application pending·0 cites
Showing the top 50 of 174 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →