Assignee
NAGASAKA HIROYUKI
JP·31 granted patents·6 pending applications·72 citations·filing 2004–2012
Top patents by PatentIndex Score
37 records- 0198US8891059B2Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating methodNAGASAKA HIROYUKI·Filed 2011·Granted Nov 18, 2014·30 cites·20 claims
- 0289US8717533B2Exposure apparatus, exposure method, and method for producing deviceNAGASAKA HIROYUKI·Filed 2007·Granted May 6, 2014·11 cites·13 claims
- 0386US8721803B2Cleaning liquid, cleaning method, liquid generating apparatus, exposure apparatus, and device fabricating methodNAGASAKA HIROYUKI·Filed 2011·Granted May 13, 2014·4 cites·8 claims
- 0485US8218127B2Exposure apparatus and device manufacturing methodNAGASAKA HIROYUKI·Filed 2009·Granted Jul 10, 2012·4 cites·45 claims
- 0581US8064037B2Immersion exposure apparatus and device manufacturing method with no liquid recovery during exposureNAGASAKA HIROYUKI·Filed 2006·Granted Nov 22, 2011·4 cites·27 claims
- 0680US8698998B2Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing deviceNAGASAKA HIROYUKI·Filed 2007·Granted Apr 15, 2014·4 cites·29 claims
- 0777US8064044B2Exposure apparatus, exposure method, and device producing methodNAGASAKA HIROYUKI·Filed 2004·Granted Nov 22, 2011·10 cites·28 claims
- 0874US9588436B2Exposure apparatus, exposure method, and device producing methodNAGASAKA HIROYUKI·Filed 2011·Granted Mar 7, 2017·1 cites·16 claims
- 0970US8482716B2Exposure apparatus, exposure method, and method for producing deviceNAGASAKA HIROYUKI·Filed 2005·Granted Jul 9, 2013·1 cites·32 claims
- 1070US8089608B2Exposure apparatus, exposure method, and device manufacturing methodNAGASAKA HIROYUKI·Filed 2006·Granted Jan 3, 2012·2 cites·31 claims
- 1163US8797505B2Exposure apparatus and device manufacturing methodNAGASAKA HIROYUKI·Filed 2012·Granted Aug 5, 2014·0 cites·76 claims
- 1262US8736809B2Exposure apparatus, exposure method, and method for producing deviceNAGASAKA HIROYUKI·Filed 2010·Granted May 27, 2014·0 cites·94 claims
- 1362US8472001B2Exposure method, exposure apparatus, and method for producing deviceNAGASAKA HIROYUKI·Filed 2008·Granted Jun 25, 2013·0 cites·21 claims
- 1461US8692973B2Exposure apparatus and method for producing deviceNAGASAKA HIROYUKI·Filed 2007·Granted Apr 8, 2014·1 cites·13 claims
- 1560US8488108B2Exposure method, exposure apparatus, and method for producing deviceNAGASAKA HIROYUKI·Filed 2008·Granted Jul 16, 2013·0 cites·34 claims
- 1659US8810767B2Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing deviceNAGASAKA HIROYUKI·Filed 2009·Granted Aug 19, 2014·0 cites·25 claims
- 1759US8102504B2Exposure apparatus, exposure method, and method for producing deviceNAGASAKA HIROYUKI·Filed 2006·Granted Jan 24, 2012·0 cites·42 claims
- 1857US10209622B2Exposure method and device manufacturing method having lower scanning speed to expose peripheral shot areaNAGASAKA HIROYUKI·Filed 2011·Granted Feb 19, 2019·0 cites·70 claims
- 1957US8704999B2Exposure apparatus, exposure method, and method for producing deviceNAGASAKA HIROYUKI·Filed 2010·Granted Apr 22, 2014·0 cites·16 claims
- 2056US8879043B2Exposure apparatus and method for manufacturing deviceNAGASAKA HIROYUKI·Filed 2010·Granted Nov 4, 2014·0 cites·22 claims
- 2155US9256137B2Exposure apparatus, liquid holding method, and device manufacturing methodNAGASAKA HIROYUKI·Filed 2012·Granted Feb 9, 2016·0 cites·32 claims
- 2255US9019469B2Exposure apparatus, exposure method, method for producing device, and optical partNAGASAKA HIROYUKI·Filed 2006·Granted Apr 28, 2015·0 cites·23 claims
- 2355US8189168B2Exposure apparatus, device production method, cleaning apparatus, cleaning method, and exposure methodNAGASAKA HIROYUKI·Filed 2008·Granted May 29, 2012·0 cites·69 claims
- 2453US8724077B2Exposure apparatus, exposure method, and device manufacturing methodNAGASAKA HIROYUKI·Filed 2011·Granted May 13, 2014·0 cites·32 claims
- 2552US2012204913A1Exposure apparatus, device production method, cleaning apparatus, cleaning method, and exposure methodNAGASAKA HIROYUKI·Filed 2012·Application pending·0 cites
- 2651US8330934B2Exposure apparatus and device manufacturing methodNAGASAKA HIROYUKI·Filed 2010·Granted Dec 11, 2012·0 cites·7 claims
- 2751US2012307220A1Maintenance Method, Exposure Method, Exposure Apparatus, and Method for Producing DeviceNAGASAKA HIROYUKI·Filed 2012·Application pending·0 cites
- 2849US8982322B2Exposure apparatus and device manufacturing methodNAGASAKA HIROYUKI·Filed 2007·Granted Mar 17, 2015·0 cites·23 claims
- 2949US8488099B2Exposure apparatus and device manufacturing methodNAGASAKA HIROYUKI·Filed 2005·Granted Jul 16, 2013·0 cites·27 claims
- 3048US8570484B2Immersion exposure apparatus, device manufacturing method, cleaning method, and cleaning member to remove foreign substance using liquidNAGASAKA HIROYUKI·Filed 2007·Granted Oct 29, 2013·0 cites·18 claims
- 3148US2008068567A1Exposure Apparatus, Exposure Method, and Method for Producing DeviceNAGASAKA HIROYUKI·Filed 2005·Application pending·0 cites
- 3247US8253921B2Exposure apparatus and device fabricating methodNAGASAKA HIROYUKI·Filed 2006·Granted Aug 28, 2012·0 cites·30 claims
- 3346US8508713B2Exposure apparatus, exposure method, and method for producing deviceNAGASAKA HIROYUKI·Filed 2007·Granted Aug 13, 2013·0 cites·15 claims
- 3445US8390779B2Exposure apparatus, exposure method, and method for producing deviceNAGASAKA HIROYUKI·Filed 2007·Granted Mar 5, 2013·0 cites·47 claims
- 3544US2009033896A1Exposure apparatus and method, and device manufacturing methodNAGASAKA HIROYUKI·Filed 2006·Application pending·0 cites
- 3643US2013050666A1Exposure apparatus, liquid holding method, and device manufacturing methodNAGASAKA HIROYUKI·Filed 2012·Application pending·0 cites
- 3743US2009047607A1Exposure method, exposure apparatus and device fabricating methodsNAGASAKA HIROYUKI·Filed 2006·Application pending·0 cites
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