Inventor · disambiguated record
Hisajiro Nakano
Also filed as: NAKANO HISAJIRO
13 granted patents·8 pending applications·16 citations·filing 2012–2023
85Inventor score
Files withEBARA CORP21
Top patents by PatentIndex Score
21 records- 0193US10741423B2Substrate cleaning apparatus, substrate processing apparatus, and method of cleaning substrateEBARA CORP·Filed 2018·Granted Aug 11, 2020·9 cites·7 claims
- 0270US2024082987A1Substrate clamping apparatusEBARA CORP·Filed 2023·Application pending·0 cites
- 0369US11094548B2Apparatus for cleaning substrate and substrate cleaning methodEBARA CORP·Filed 2017·Granted Aug 17, 2021·1 cites·21 claims
- 0468US10991602B2Substrate washing deviceEBARA CORP·Filed 2017·Granted Apr 27, 2021·1 cites·7 claims
- 0568US10096492B2Substrate cleaning apparatus and polishing apparatusEBARA CORP·Filed 2013·Granted Oct 9, 2018·2 cites·20 claims
- 0668US9472441B2Substrate processing apparatusEBARA CORP·Filed 2013·Granted Oct 18, 2016·2 cites·6 claims
- 0766US2024082885A1Substrate cleaning device and method of cleaning substrateEBARA CORP·Filed 2023·Application pending·0 cites
- 0864US10361101B2Substrate cleaning apparatus and substrate processing apparatus XEBARA CORP·Filed 2017·Granted Jul 23, 2019·1 cites·8 claims
- 0964US2023390898A1Substrate clamping apparatusEBARA CORP·Filed 2022·Application pending·0 cites
- 1063US11532491B2Substrate cleaning apparatus, substrate processing apparatus, and method of cleaning substrateEBARA CORP·Filed 2020·Granted Dec 20, 2022·0 cites·5 claims
- 1161US11495475B2Method of cleaning a substrateEBARA CORP·Filed 2020·Granted Nov 8, 2022·0 cites·7 claims
- 1258US2022203411A1Substrate cleaning device and method of cleaning substrateEBARA CORP·Filed 2021·Application pending·0 cites
- 1355US11948827B2Substrate support mechanism, substrate cleaning device and substrate processing methodEBARA CORP·Filed 2022·Granted Apr 2, 2024·0 cites·14 claims
- 1452US2025164977A1Substrate support device, cleaning device, device and method for calculating rotation speed of substrate, and machine learning deviceEBARA CORP·Filed 2022·Application pending·0 cites
- 1551US11664252B2Cleaning device, polishing device, and device and method for calculating rotation speed of substrate in cleaning deviceEBARA CORP·Filed 2020·Granted May 30, 2023·0 cites·22 claims
- 1650US11311918B2Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2020·Granted Apr 26, 2022·0 cites·9 claims
- 1750US2014190633A1Substrate cleaning apparatus and polishing apparatusEBARA CORP·Filed 2013·Application pending·0 cites
- 1849US11180303B2Storage container of scrubbing member and package of sameEBARA CORP·Filed 2018·Granted Nov 23, 2021·0 cites·6 claims
- 1948US11626299B2Cover for swing member of substrate processing apparatus, swing member of substrate processing apparatus, and substrate processing apparatusEBARA CORP·Filed 2020·Granted Apr 11, 2023·0 cites·13 claims
- 2048US2022016651A1Substrate cleaning devices, substrate processing apparatus, substrate cleaning method, and nozzleEBARA CORP·Filed 2021·Application pending·0 cites
- 2139US2013167947A1Liquid scattering prevention cup, substrate processing apparatus provided with the cup, and substrate polishing apparatusEBARA CORP·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →