Inventor · disambiguated record
Hidetoshi Nakao
Also filed as: NAKAO HIDETOSHI
3 granted patents·19 citations·filing 2006–2021
60Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0187US7581335B2Substrate drying processing apparatus, method, and program recording mediumTOKYO ELECTRON LTD·Filed 2006·Granted Sep 1, 2009·18 cites·16 claims
- 0261US9768039B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Sep 19, 2017·1 cites·9 claims
- 0347US12170209B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Dec 17, 2024·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →