Inventor · disambiguated record
Hiromitsu Namba
Also filed as: NAMBA HIROMITSU
12 granted patents·4 pending applications·69 citations·filing 2009–2020
88Inventor score
Technology areasH10P
Top patents by PatentIndex Score
16 records- 0193US8828183B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2012·Granted Sep 9, 2014·30 cites·10 claims
- 0288US8398817B2Chemical-liquid processing apparatus and chemical-liquid processing methodNAMBA HIROMITSU·Filed 2010·Granted Mar 19, 2013·15 cites·11 claims
- 0387US11437252B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Sep 6, 2022·2 cites·10 claims
- 0485US8696863B2Liquid processing apparatus and liquid processing methodHIGASHIJIMA JIRO·Filed 2010·Granted Apr 15, 2014·8 cites·3 claims
- 0582US9859136B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2014·Granted Jan 2, 2018·5 cites·10 claims
- 0676US8567339B2Liquid processing apparatusHIGASHIJIMA JIRO·Filed 2010·Granted Oct 29, 2013·4 cites·13 claims
- 0774US9508567B2Cleaning jig and cleaning method for cleaning substrate processing apparatus, and substrate processing systemTOKYO ELECTRON LTD·Filed 2013·Granted Nov 29, 2016·3 cites·8 claims
- 0871US9165800B2Liquid processing method, liquid processing apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2013·Granted Oct 20, 2015·2 cites·7 claims
- 0956US10707102B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2017·Granted Jul 7, 2020·0 cites·6 claims
- 1054US2010139702A1Liquid processing method, liquid processing apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1149US8590547B2Liquid processing apparatusHIGASHIJIMA JIRO·Filed 2009·Granted Nov 26, 2013·0 cites·9 claims
- 1248US2010139703A1Liquid processing method, liquid processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1342US2014251539A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 1437US8529707B2Liquid processing apparatus, liquid processing method, and storage medium having computer program recorded thereinNAMBA HIROMITSU·Filed 2011·Granted Sep 10, 2013·0 cites·6 claims
- 1536US2011062114A1Substrate liquid-processing method, substrate liquid-processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 1633US8815112B2Liquid processing method, recording medium having recorded program for executing liquid processing method therein and liquid processing apparatusMIZUNO TSUYOSHI·Filed 2011·Granted Aug 26, 2014·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →