Inventor · disambiguated record
Hiroto Otake
Also filed as: OTAKE HIROTO
4 granted patents·3 pending applications·11 citations·filing 2019–2024
68Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0195US11295960B1Etching methodHITACHI HIGH TECH CORP·Filed 2021·Granted Apr 5, 2022·6 cites·15 claims
- 0293US12125708B2Etching methodHITACHI HIGH TECH CORP·Filed 2020·Granted Oct 22, 2024·3 cites·9 claims
- 0379US11217454B2Plasma processing method and etching apparatusHITACHI HIGH TECH CORP·Filed 2019·Granted Jan 4, 2022·2 cites·4 claims
- 0475US2025014907A1Etching methodHITACHI HIGH TECH CORP·Filed 2024·Application pending·0 cites
- 0557US11901192B2Etching processing method and etching processing apparatusHITACHI HIGH TECH CORP·Filed 2020·Granted Feb 13, 2024·0 cites·28 claims
- 0645US2023386793A1Etching method and etching apparatusHITACHI HIGH TECH CORP·Filed 2021·Application pending·0 cites
- 0741US2021050191A1Methods and systems for plasma processing tool matching after preventative maintenanceTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →