Inventor · disambiguated record
Hirotaka Satori
Also filed as: SATORI HIROTAKA
1 granted patent·1 pending application·0 citations·filing 2020–2021
4Inventor score
Files withEBARA CORP2
Top patents by PatentIndex Score
2 records- 0156US2021354262A1Film thickness measurement apparatus, polishing apparatus, and film thickness measurement methodEBARA CORP·Filed 2021·Application pending·0 cites
- 0243US11701750B2Top ring for holding a substrate and substrate processing apparatusEBARA CORP·Filed 2020·Granted Jul 18, 2023·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →