Inventor · disambiguated record
Hideji Shibata
Also filed as: SHIBATA HIDEJI
1 granted patent·1 pending application·0 citations·filing 2010–2013
13Inventor score
Technology areasH10P
Files withHITACHI INT ELECTRIC INC2
Top patents by PatentIndex Score
2 records- 0144US9177799B2Semiconductor device manufacturing method and substrate manufacturing method of forming silicon carbide films on the substrateHITACHI INT ELECTRIC INC·Filed 2013·Granted Nov 3, 2015·0 cites·10 claims
- 0239US2010297832A1Semiconductor device manufacturing method, substrate processing apparatus, substrate manufacturing methodHITACHI INT ELECTRIC INC·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →