Inventor · disambiguated record
Hisae Shibuya
Also filed as: SHIBUYA HISAE
43 granted patents·12 pending applications·511 citations·filing 2001–2022
98Inventor score
Top patents by PatentIndex Score
55 records- 0196US7474394B2Apparatus of inspecting defect in semiconductor and method of the sameHITACHI HIGH TECH CORP·Filed 2006·Granted Jan 6, 2009·27 cites·13 claims
- 0296US6876445B2Method for analyzing defect data and inspection apparatus and review systemHITACHI LTD·Filed 2002·Granted Apr 5, 2005·61 cites·17 claims
- 0394US9483049B2Anomaly detection and diagnosis/prognosis method, anomaly detection and diagnosis/prognosis system, and anomaly detection and diagnosis/prognosis programMAEDA SHUNJI·Filed 2010·Granted Nov 1, 2016·28 cites·23 claims
- 0493US9933338B2Health management system, fault diagnosis system, health management method, and fault diagnosis methodHITACHI POWER SOLUTIONS CO LTD·Filed 2014·Granted Apr 3, 2018·38 cites·10 claims
- 0593US8682824B2Method and device for monitoring the state of a facilitySHIBUYA HISAE·Filed 2010·Granted Mar 25, 2014·18 cites·21 claims
- 0693US7751036B2Apparatus of inspecting defect in semiconductor and method of the sameHITACHI HIGH TECH CORP·Filed 2009·Granted Jul 6, 2010·14 cites·10 claims
- 0793US7084968B2Method for analyzing defect data and inspection apparatus and review systemHITACHI HIGH TECH CORP·Filed 2005·Granted Aug 1, 2006·15 cites·24 claims
- 0892US8310665B2Inspecting method and inspecting apparatus for substrate surfaceHAMAMATSU AKIRA·Filed 2012·Granted Nov 13, 2012·9 cites·18 claims
- 0992US8144337B2Inspecting method and inspecting apparatus for substrate surfaceHAMAMATSU AKIRA·Filed 2009·Granted Mar 27, 2012·15 cites·15 claims
- 1091US8630962B2Error detection method and its system for early detection of errors in a planar or facilitiesMAEDA SHUNJI·Filed 2009·Granted Jan 14, 2014·27 cites·14 claims
- 1190US7848563B2Method and apparatus for inspecting a defect of a patternHITACHI HIGH TECH CORP·Filed 2006·Granted Dec 7, 2010·18 cites·14 claims
- 1289US9779495B2Anomaly diagnosis method and apparatusHITACHI LTD·Filed 2014·Granted Oct 3, 2017·9 cites·13 claims
- 1389US8027527B2Method for analyzing defect data and inspection apparatus and review systemHITACHI LTD·Filed 2006·Granted Sep 27, 2011·9 cites·12 claims
- 1488US7720275B2Method and apparatus for detecting pattern defectsHITACHI HIGH TECH CORP·Filed 2005·Granted May 18, 2010·15 cites·14 claims
- 1586US9940184B2Anomaly detecting method, and apparatus for the sameHITACHI HIGH TECH CORP·Filed 2014·Granted Apr 10, 2018·7 cites·9 claims
- 1686US8660340B2Defect classification method and apparatus, and defect inspection apparatusHITACHI HIGH TECH CORP·Filed 2013·Granted Feb 25, 2014·10 cites·4 claims
- 1786US7813539B2Method and apparatus for analyzing defect data and a review systemHITACHI HIGH TECH CORP·Filed 2003·Granted Oct 12, 2010·37 cites·16 claims
- 1884US8467594B2Method and apparatus for inspecting patterns formed on a substrateSAKAI KAORU·Filed 2010·Granted Jun 18, 2013·6 cites·6 claims
- 1984US8437534B2Defect classification method and apparatus, and defect inspection apparatusSHIBUYA HISAE·Filed 2007·Granted May 7, 2013·18 cites·16 claims
- 2083US9465387B2Anomaly diagnosis system and anomaly diagnosis methodHITACHI POWER SOLUTIONS CO LTD·Filed 2015·Granted Oct 11, 2016·5 cites·17 claims
- 2183US8116556B2Method and apparatus for analyzing defect data and a review systemSHIBUYA HISAE·Filed 2010·Granted Feb 14, 2012·6 cites·11 claims
- 2282US7940385B2Defect inspection apparatus and its methodHITACHI HIGH TECH CORP·Filed 2008·Granted May 10, 2011·5 cites·10 claims
- 2381US8824774B2Method and apparatus for inspecting patterns formed on a substrateHITACHI HIGH TECH CORP·Filed 2013·Granted Sep 2, 2014·4 cites·12 claims
- 2481US7912276B2Method and apparatus for detecting pattern defectsHITACHI HIGH TECH CORP·Filed 2010·Granted Mar 22, 2011·5 cites·16 claims
- 2580US8654350B2Inspecting method and inspecting apparatus for substrate surfaceHAMAMATSU AKIRA·Filed 2012·Granted Feb 18, 2014·2 cites·10 claims
- 2680US8355123B2Defect inspection apparatus and its methodHITACHI HIGH TECH CORP·Filed 2012·Granted Jan 15, 2013·2 cites·20 claims
- 2780US6792366B2Method and apparatus for inspecting defects in a semiconductor waferHITACHI LTD·Filed 2001·Granted Sep 14, 2004·21 cites·10 claims
- 2879US8149396B2Defect inspection apparatus and its methodHAMAMATSU AKIRA·Filed 2011·Granted Apr 3, 2012·2 cites·10 claims
- 2977US11378521B2Optical condition determination system and optical condition determination methodHITACHI LTD·Filed 2020·Granted Jul 5, 2022·1 cites·10 claims
- 3077US6792367B2Method and apparatus for inspecting defects in a semiconductor waferHITACHI LTD·Filed 2002·Granted Sep 14, 2004·18 cites·2 claims
- 3177US6741941B2Method and apparatus for analyzing defect informationHITACHI LTD·Filed 2003·Granted May 25, 2004·19 cites·28 claims
- 3276US10977568B2Information processing apparatus, diagnosis method, and programHITACHI POWER SOLUTIONS CO LTD·Filed 2015·Granted Apr 13, 2021·2 cites·15 claims
- 3375US8310666B2Apparatus of inspecting defect in semiconductor and method of the sameHAMAMATSU AKIRA·Filed 2011·Granted Nov 13, 2012·1 cites·12 claims
- 3475US8139841B2Visual inspection method and apparatus and image analysis systemSHIBUYA HISAE·Filed 2008·Granted Mar 20, 2012·6 cites·9 claims
- 3573US6870169B2Method and apparatus for analyzing composition of defectsHITACHI LTD·Filed 2003·Granted Mar 22, 2005·18 cites·23 claims
- 3671US8306312B2Method and apparatus for detecting pattern defectsSHIBUYA HISAE·Filed 2011·Granted Nov 6, 2012·2 cites·20 claims
- 3769US8086422B2Method for analyzing defect data and inspection apparatus and review systemSHIBUYA HISAE·Filed 2008·Granted Dec 27, 2011·1 cites·22 claims
- 3864US9659250B2Facility state monitoring method and device for sameSHIBUYA HISAE·Filed 2011·Granted May 23, 2017·3 cites·13 claims
- 3963US7639277B2Method for evaluating color picture tubes and device for the same and method for making color picture tubesHITACHI LTD·Filed 2001·Granted Dec 29, 2009·7 cites·26 claims
- 4062US8643834B2Apparatus of inspecting defect in semiconductor and method of the sameHAMAMATSU AKIRA·Filed 2012·Granted Feb 4, 2014·0 cites·12 claims
- 4158US7952699B2Apparatus of inspecting defect in semiconductor and method of the sameHITACHI HIGH TECH CORP·Filed 2010·Granted May 31, 2011·0 cites·12 claims
- 4256US12385679B2Refrigerant quantity diagnosis device, refrigerant system, and refrigerant quantity diagnosis methodHITACHI GLOBAL LIFE SOLUTIONS INC·Filed 2022·Granted Aug 12, 2025·0 cites·14 claims
- 4351US8620061B2Visual inspection method and apparatus and image analysis systemSHIBUYA HISAE·Filed 2012·Granted Dec 31, 2013·0 cites·6 claims
- 4451US2012290497A1Failure diagnosis system, failure diagnosis device and failure diagnosis programMAGARA HIROYUKI·Filed 2010·Application pending·0 cites
- 4548US2012041575A1Anomaly Detection Method and Anomaly Detection SystemMAEDA SHUNJI·Filed 2009·Application pending·0 cites
- 4647US2015213706A1Facility status monitoring method and facility status monitoring deviceHITACHI LTD·Filed 2013·Application pending·0 cites
- 4746US2014039834A1Method and apparatus for monitoring equipment conditionsHITACHI POWER SOLUTIONS CO LTD·Filed 2013·Application pending·0 cites
- 4844US2014195184A1Anomaly Detection/Diagnostic Method and Anomaly Detection/Diagnostic SystemMAEDA SHUNJI·Filed 2012·Application pending·0 cites
- 4943US2013282336A1Anomaly Sensing and Diagnosis Method, Anomaly Sensing and Diagnosis System, Anomaly Sensing and Diagnosis Program and Enterprise Asset Management and Infrastructure Asset Management SystemMAEDA SHUNJI·Filed 2011·Application pending·0 cites
- 5042US2013073260A1Method for anomaly detection/diagnosis, system for anomaly detection/diagnosis, and program for anomaly detection/diagnosisMAEDA SHUNJI·Filed 2011·Application pending·0 cites
Showing the top 50 of 55 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →