Inventor · disambiguated record
Hiroyuki Shichida
Also filed as: SHICHIDA HIROYUKI
18 granted patents·1,099 citations·filing 1993–2005
96Inventor score
Top patents by PatentIndex Score
18 records- 0198USD557226SElectrode cover for a plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Dec 11, 2007·619 cites·1 claims
- 0290US6048434ASubstrate holding system including an electrostatic chuckHITACHI LTD·Filed 1996·Granted Apr 11, 2000·68 cites·15 claims
- 0388US5906684AMethod of holding substrate and substrate holding systemHITACHI LTD·Filed 1998·Granted May 25, 1999·54 cites·21 claims
- 0487US6524428B2Method of holding substrate and substrate holding systemHITACHI LTD·Filed 2001·Granted Feb 25, 2003·24 cites·11 claims
- 0587US5792304AMethod of holding substrate and substrate holding systemHITACHI LTD·Filed 1994·Granted Aug 11, 1998·62 cites·14 claims
- 0686US6217705B1Method of holding substrate and substrate holding systemHITACHI LTD·Filed 2000·Granted Apr 17, 2001·26 cites·10 claims
- 0784US6645871B2Method of holding substrate and substrate holding systemHITACHI LTD·Filed 2001·Granted Nov 11, 2003·20 cites·5 claims
- 0884US5580420APlasma generating method and apparatus and plasma processing method and apparatusHITACHI LTD·Filed 1994·Granted Dec 3, 1996·39 cites·52 claims
- 0979US5458687AMethod of and apparatus for securing and cooling/heating a waferHITACHI LTD·Filed 1993·Granted Oct 17, 1995·67 cites·10 claims
- 1077US6899789B2Method of holding substrate and substrate holding systemHITACHI LTD·Filed 2003·Granted May 31, 2005·11 cites·5 claims
- 1174US6676805B2Method of holding substrate and substrate holding systemHITACHI LTD·Filed 2002·Granted Jan 13, 2004·10 cites·12 claims
- 1272US6544379B2Method of holding substrate and substrate holding systemHITACHI LTD·Filed 2001·Granted Apr 8, 2003·9 cites·50 claims
- 1370US6610170B2Method of holding substrate and substrate holding systemHITACHI LTD·Filed 2002·Granted Aug 26, 2003·8 cites·2 claims
- 1470US5961774AMethod of holding substrate and substrate holding systemHITACHI LTD·Filed 1997·Granted Oct 5, 1999·22 cites·6 claims
- 1568US6336991B1Method of holding substrate and substrate holding systemHITACHI LTD·Filed 1998·Granted Jan 8, 2002·19 cites·10 claims
- 1666US6610171B2Method of holding substrate and substrate holding systemHITACHI LTD·Filed 2002·Granted Aug 26, 2003·6 cites·2 claims
- 1766US6221201B1Method of holding substrate and substrate holding systemHITACHI LTD·Filed 1998·Granted Apr 24, 2001·18 cites·2 claims
- 1865US5985035AMethod of holding substrate and substrate holding systemHITACHI LTD·Filed 1998·Granted Nov 16, 1999·17 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →