Inventor · disambiguated record
Hiroshi Shinya
Also filed as: SHINYA HIROSHI
18 granted patents·3 pending applications·342 citations·filing 1988–2011
95Inventor score
Top patents by PatentIndex Score
21 records- 0191US7980003B2Heat processing apparatus and heat processing methodTOKYO ELECTRON LTD·Filed 2007·Granted Jul 19, 2011·16 cites·9 claims
- 0288US7024798B2Low-pressure dryer and low-pressure drying methodTOKYO ELECTRON LTD·Filed 2005·Granted Apr 11, 2006·10 cites·4 claims
- 0387US6796054B2Low-pressure dryer and low-pressure drying methodTOKYO ELECTRON LTD·Filed 2003·Granted Sep 28, 2004·30 cites·15 claims
- 0486US5876280ASubstrate treating system and substrate treating methodTOKYO ELECTRON LTD·Filed 1997·Granted Mar 2, 1999·91 cites·26 claims
- 0582US7757626B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2006·Granted Jul 20, 2010·8 cites·11 claims
- 0682US6957378B2Semiconductor memory deviceTOSHIBA KK·Filed 2002·Granted Oct 18, 2005·39 cites·30 claims
- 0781US8782918B2Heat processing apparatus and heat processing methodAOKI SHIGEKI·Filed 2011·Granted Jul 22, 2014·6 cites·16 claims
- 0874US6573031B2Apparatus and method of thermal processing and method of pattern formationTOKYO ELECTRON LTD·Filed 2001·Granted Jun 3, 2003·24 cites·22 claims
- 0974US5928390AVertical processing apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Jul 27, 1999·45 cites·49 claims
- 1071US7060939B2Substrate heating method, substrate heating system, and applying developing systemTOKYO ELECTRON LTD·Filed 2003·Granted Jun 13, 2006·11 cites·17 claims
- 1171US4849653ASemiconductor circuit device for preventing an output of a bistable circuit from becoming unstableTOSHIBA KK·Filed 1988·Granted Jul 18, 1989·19 cites·5 claims
- 1269US7223945B2Substrate heating method, substrate heating system, and applying developing systemTOKYO ELECTRON LTD·Filed 2006·Granted May 29, 2007·2 cites·9 claims
- 1369US6986214B2Low-pressure dryer and low-pressure drying methodTOKYO ELECTRON LTD·Filed 2004·Granted Jan 17, 2006·9 cites·5 claims
- 1465US7385849B2Semiconductor integrated circuit deviceTOSHIBA KK·Filed 2006·Granted Jun 10, 2008·6 cites·12 claims
- 1565US6570801B2Semiconductor memory having refresh functionTOSHIBA KK·Filed 2001·Granted May 27, 2003·14 cites·28 claims
- 1660US7266759B2Semiconductor integrated circuit device and error checking and correcting method thereofTOSHIBA KK·Filed 2004·Granted Sep 4, 2007·8 cites·2 claims
- 1751US7050710B2Thermal treatment equipment and thermal treatment methodTOKYO ELECTRON LTD·Filed 2002·Granted May 23, 2006·4 cites·20 claims
- 1850US2007137556A1Thermal processing appparatusTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
- 1942US2003145791A1Thermal processing apparatusTOKYO ELECTRON LTD·Filed 2003·Application pending·0 cites
- 2041US8192796B2Substrate processing apparatus and substrate processing methodSHINYA HIROSHI·Filed 2010·Granted Jun 5, 2012·0 cites·11 claims
- 2138US2011189400A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2011·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Hiroshi Shinya files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →