Inventor · disambiguated record
Hironari Takahashi
Also filed as: TAKAHASHI HIRONARI
6 granted patents·448 citations·filing 1993–2020
86Inventor score
Top patents by PatentIndex Score
6 records- 0195US5584963ASemiconductor device manufacturing apparatus and cleaning method for the apparatusMITSUBISHI ELECTRIC CORP·Filed 1995·Granted Dec 17, 1996·331 cites·5 claims
- 0287US5365772ALeak detection in a reduced pressure processing apparatusTOKYO ELECTRON LTD·Filed 1993·Granted Nov 22, 1994·56 cites·15 claims
- 0376US5517943AVacuum CVD apparatusMITSUBISHI ELECTRIC CORP·Filed 1994·Granted May 21, 1996·36 cites·1 claims
- 0454US5607515AMethod of cleaning CVD apparatusMITSUBISHI ELECTRIC CORP·Filed 1995·Granted Mar 4, 1997·16 cites·1 claims
- 0539US5914000AApparatus for manufacturing semiconductor device and method of removing silicon oxidation filmMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Jun 22, 1999·9 cites·18 claims
- 0637US12197600B2Information processing apparatus, information processing method and programNTT COMM CORP·Filed 2020·Granted Jan 14, 2025·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →