Inventor · disambiguated record
Hideyuki Takamori
Also filed as: TAKAMORI HIDEYUKI
17 granted patents·1 pending application·668 citations·filing 1991–2004
96Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD17
Top patents by PatentIndex Score
18 records- 0194US6319317B1Coating film forming method and coating apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Nov 20, 2001·75 cites·12 claims
- 0289US6447608B1Spin coating apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Sep 10, 2002·43 cites·10 claims
- 0385US6837672B1Apparatus for and method of transferring substratesTOKYO ELECTRON LTD·Filed 2000·Granted Jan 4, 2005·26 cites·2 claims
- 0485US6443641B2Substrate process method and substrate process apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Sep 3, 2002·28 cites·7 claims
- 0584US6306455B1Substrate processing methodTOKYO ELECTRON LTD·Filed 1998·Granted Oct 23, 2001·65 cites·8 claims
- 0682US6485782B2Coating film forming method and coating apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Nov 26, 2002·24 cites·12 claims
- 0782US6264748B1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Jul 24, 2001·79 cites·35 claims
- 0880US6159541ASpin coating processTOKYO ELECTRON LTD·Filed 1998·Granted Dec 12, 2000·50 cites·20 claims
- 0977US6962477B2Apparatus for and method of transferring substratesTOKYO ELECTRON LTD·Filed 2004·Granted Nov 8, 2005·14 cites·2 claims
- 1077US5250114ACoating apparatus with nozzle moving meansTOKYO ELECTRON LTD·Filed 1991·Granted Oct 5, 1993·61 cites·8 claims
- 1176US6261007B1Substrate process method and substrate process apparatusTOKYO ELECTRON LTD·Filed 1999·Granted Jul 17, 2001·43 cites·6 claims
- 1272US6152677AApparatus for and method of transferring substratesTOKYO ELECTRON LTD·Filed 1998·Granted Nov 28, 2000·32 cites·16 claims
- 1368US6451515B2Substrate treating methodTOKYO ELECTRON LTD·Filed 1999·Granted Sep 17, 2002·31 cites·10 claims
- 1467US5416047AMethod for applying process solution to substratesTOKYO ELECTRON LTD·Filed 1993·Granted May 16, 1995·42 cites·10 claims
- 1566US6635113B2Coating apparatus and coating methodTOKYO ELECTRON LTD·Filed 1999·Granted Oct 21, 2003·31 cites·6 claims
- 1651US5514852AHeat treatment deviceTOKYO ELECTRON LTD·Filed 1994·Granted May 7, 1996·21 cites·19 claims
- 1746US7550043B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Jun 23, 2009·3 cites·4 claims
- 1840US2002187423A1Substrate treating methodFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →