Inventor · disambiguated record
Hideo Takino
Also filed as: TAKINO HIDEO
2 granted patents·1 pending application·21 citations·filing 2002–2012
53Inventor score
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3 records- 0170US6984051B2Multifaceted reflecting mirror, illumination optical system based on use of the same, and semiconductor exposure apparatusNIKON CORP·Filed 2002·Granted Jan 10, 2006·21 cites·31 claims
- 0240US2014176931A1Intermittent temperature control of movable optical elementsPHILLIPS ALTON H·Filed 2012·Application pending·0 cites
- 0333US9477156B2Reflecting optical member, optical system, exposure apparatus, and device manufacturing methodTAKINO HIDEO·Filed 2011·Granted Oct 25, 2016·0 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →