Inventor · disambiguated record
Hideyoshi Tsuruta
Also filed as: TSURUTA HIDEYOSHI
29 granted patents·3 pending applications·1,012 citations·filing 1996–2016
97Inventor score
Top patents by PatentIndex Score
32 records- 0199US6608745B2Electrostatic chunksNGK INSULATORS LTD·Filed 2001·Granted Aug 19, 2003·496 cites·20 claims
- 0295US7189946B2Substrate heating deviceNGK INSULATORS LTD·Filed 2005·Granted Mar 13, 2007·30 cites·13 claims
- 0394US7247819B2Substrate heating apparatusNGK INSULATORS LTD·Filed 2005·Granted Jul 24, 2007·26 cites·19 claims
- 0492US7582184B2Plasma processing memberNGK INSULATORS LTD·Filed 2006·Granted Sep 1, 2009·26 cites·2 claims
- 0589US6057513AJoint structure of metal member and ceramic member and method of producing the sameNGK INSULATORS LTD·Filed 1998·Granted May 2, 2000·92 cites·8 claims
- 0687US7525071B2Power-supplying member and heating apparatus using the sameNGK INSULATORS LTD·Filed 2006·Granted Apr 28, 2009·12 cites·5 claims
- 0784US5794838ACeramics joined body and method of joining ceramicsNGK INSULATORS LTD·Filed 1996·Granted Aug 18, 1998·46 cites·4 claims
- 0881US7247818B2Substrate heating apparatus and manufacturing method for the sameNGK INSULATORS LTD·Filed 2005·Granted Jul 24, 2007·7 cites·10 claims
- 0981US7126093B2Heating systemsNGK INSULATORS LTD·Filed 2005·Granted Oct 24, 2006·7 cites·15 claims
- 1080US7044399B2Heating systemsNGK INSULATORS LTD·Filed 2003·Granted May 16, 2006·22 cites·12 claims
- 1180US6800576B2Aluminum nitride sintered bodies and members for semiconductor-producing apparatusesNGK INSULATORS LTD·Filed 2001·Granted Oct 5, 2004·22 cites·53 claims
- 1280US5817406ACeramic susceptor with embedded metal electrode and brazing material connectionAPPLIED MATERIALS INC·Filed 1996·Granted Oct 6, 1998·61 cites·22 claims
- 1379US7403386B2Electrostatic chuckNGK INSULATORS LTD·Filed 2006·Granted Jul 22, 2008·6 cites·8 claims
- 1478US7763831B2Heating deviceNGK INSULATORS LTD·Filed 2007·Granted Jul 27, 2010·6 cites·11 claims
- 1578US7042697B2Electrostatic chucks and electrostatically attracting structuresNGK INSULATORS LTD·Filed 2003·Granted May 9, 2006·18 cites·18 claims
- 1677US7679034B2Power-supplying member and heating apparatus using the sameNGK INSULATORS LTD·Filed 2006·Granted Mar 16, 2010·5 cites·9 claims
- 1772US7576967B2Electrostatic chuckNGK INSULATORS LTD·Filed 2007·Granted Aug 18, 2009·4 cites·5 claims
- 1871US6225606B1Ceramic heaterNGK INSULATORS LTD·Filed 1998·Granted May 1, 2001·31 cites·4 claims
- 1969US6617514B1Ceramics joint structure and method of producing the sameNGK INSULATORS LTD·Filed 1998·Granted Sep 9, 2003·36 cites·6 claims
- 2067US7060945B2Substrate heater and fabrication method for the sameNGK INSULATORS LTD·Filed 2004·Granted Jun 13, 2006·11 cites·12 claims
- 2166US6785115B2Electrostatic chuck and substrate processing apparatusNGK INSULATORS LTD·Filed 2002·Granted Aug 31, 2004·11 cites·4 claims
- 2266US5995357ACeramic member-electric power supply connector coupling structureNGK INSULATORS LTD·Filed 1998·Granted Nov 30, 1999·23 cites·12 claims
- 2357US6636413B2Electrostatic chucks and process for producing the sameNGK INSULATORS LTD·Filed 2001·Granted Oct 21, 2003·5 cites·16 claims
- 2455US6728091B2Electrostatic adsorption deviceNGK INSULATORS LTD·Filed 2002·Granted Apr 27, 2004·6 cites·18 claims
- 2550US7022947B2Systems for supporting ceramic susceptorsNGK INSULATORS LTD·Filed 2004·Granted Apr 4, 2006·2 cites·8 claims
- 2648US7157666B2Systems for producing semiconductors and members thereforNGK INSULATORS LTD·Filed 2004·Granted Jan 2, 2007·1 cites·16 claims
- 2746US2009159588A1Heating apparatusNGK INSULATORS LTD·Filed 2008·Application pending·0 cites
- 2842US7067200B2Joined bodies and a method of producing the sameNGK INSULATORS LTD·Filed 2003·Granted Jun 27, 2006·0 cites·15 claims
- 2941US2007146961A1Electrostatic chuckNGK INSULATORS LTD·Filed 2006·Application pending·0 cites
- 3040US7220320B2Systems for producing semiconductors and members thereforNGK INSULATORS LTD·Filed 2004·Granted May 22, 2007·0 cites·4 claims
- 3140US2002012219A1Electrostatic chucks and electrostatically adsorbing structuresNGK INSULATORS LTD·Filed 2001·Application pending·0 cites
- 3239US10037910B2Wafer holder and method for manufacturing the sameNGK INSULATORS LTD·Filed 2016·Granted Jul 31, 2018·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →