Inventor · disambiguated record
Horng-Wen Chen
Also filed as: CHEN HORNG-WEN
6 granted patents·193 citations·filing 1998–2003
84Inventor score
Files withTAIWAN SEMICONDUCTOR MFG6
Top patents by PatentIndex Score
6 records- 0189US6214703B1Method to increase wafer utility by implementing deep trench in scribe lineTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Apr 10, 2001·117 cites·13 claims
- 0284US6283131B1In-situ strip process for polysilicon etching in deep sub-micron technologyTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Sep 4, 2001·39 cites·19 claims
- 0357US6254398B1Method for initiating a helium alarm particle detector in a dry etching system prior to initiation of the etching processTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Jul 3, 2001·7 cites·7 claims
- 0455US5962345AMethod to reduce contact resistance by means of in-situ ICPTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Oct 5, 1999·22 cites·18 claims
- 0554US6660528B1Method for monitoring contaminating particles in a chamberTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Dec 9, 2003·8 cites·20 claims
- 0638USRE40007EIn-situ strip process for polysilicon etching in deep sub-micron technologyTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Jan 22, 2008·0 cites·55 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →