Inventor · disambiguated record

Hongchin Shan

Also filed as: SHAN HONGCHIN

1 granted patent·15 citations·filing 1999–1999

37Inventor score

Technology areasH10P

Files withAPPLIED MATERIALS INC1

Top patents by PatentIndex Score

1 record

0147US6544429B1Enhancement of silicon oxide etch rate and substrate selectivity with xenon additionAPPLIED MATERIALS INC·Filed 1999·Granted Apr 8, 2003·15 cites·34 claims

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Hongchin Shan — Patent Inventor | PatentIndex