Inventor · disambiguated record

Hsiu-Man Chang

Also filed as: CHANG HSIU-MAN

1 granted patent·24 citations·filing 2001–2001

42Inventor score

Technology areasG03F

Files withUNITED MICROELECTRONICS CORP1

Top patents by PatentIndex Score

1 record

0180US6536130B1Overlay mark for concurrently monitoring alignment accuracy, focus, leveling and astigmatism and method of application thereofUNITED MICROELECTRONICS CORP·Filed 2001·Granted Mar 25, 2003·24 cites·14 claims

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