Inventor · disambiguated record
Hsuan-Chih Chu
Also filed as: CHU HSUAN · CHU HSUAN-CHIH
18 granted patents·16 pending applications·8 citations·filing 2017–2025
88Inventor score
Top patents by PatentIndex Score
34 records- 0198US12030008B2Particle remover and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jul 9, 2024·4 cites·20 claims
- 0286US11965237B2System and method for detecting abnormality of thin-film deposition processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Apr 23, 2024·1 cites·20 claims
- 0385US12233368B2Particle remover and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Feb 25, 2025·0 cites·20 claims
- 0484US12331392B2Deposition system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jun 17, 2025·0 cites·20 claims
- 0584US2024384417A1Thin film deposition with improved control of precursorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0684US2024387156A1Deposition system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0783US10844477B2Electromagnetic module for physical vapor depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Nov 24, 2020·3 cites·20 claims
- 0882US2025293064A1Method for depositing target material in deposition chamber with tiltable workpiece holderTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0980US2024392464A1Treatment system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1080US2025087536A1Deposition system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1179US12176253B2Deposition system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 24, 2024·0 cites·20 claims
- 1279US12104268B2Treatment system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 1, 2024·0 cites·20 claims
- 1379US11851751B2Deposition system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 26, 2023·0 cites·20 claims
- 1478US2025318450A1Resistive memory cell using an interfacial transition metal compound layer and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1577US2025314717A1System and method for measuring magnetic fields in pvd systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1676US2024389482A1Resistive memory cell using an interfacial transition metal compound layer and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1775US12341042B2Method for depositing target material in deposition chamber with tiltable workpiece holderTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jun 24, 2025·0 cites·20 claims
- 1875US2024011160A1Thin film deposition with improved control of precursorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 1975US2024381787A1Target for mramTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2073US12360179B2System and method for measuring magnetic fields in PVD systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 15, 2025·0 cites·20 claims
- 2171US12364173B2Resistive memory cell using an interfacial transition metal compound layer and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jul 15, 2025·0 cites·20 claims
- 2271US11732379B2Treatment system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 22, 2023·0 cites·20 claims
- 2371US2022406583A1Deposition system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Application pending·0 cites
- 2470US12089506B2Target for MRAMTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Sep 10, 2024·0 cites·20 claims
- 2570US2023298916A1System and method for heating semiconductor wafersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 2668US11728226B2Deposition system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 15, 2023·0 cites·20 claims
- 2766US11396695B2Electromagnetic module for physical vapor depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 26, 2022·0 cites·20 claims
- 2865US11688615B2System and method for heating semiconductor wafersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jun 27, 2023·0 cites·20 claims
- 2963US11742231B2Movable wafer holder for film deposition chamber having six degrees of freedomTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 29, 2023·0 cites·20 claims
- 3060US2024271314A1Workpiece plating and rinse apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 3157US11635400B2Gas sensorUNIV NATIONAL CHIAO TUNG·Filed 2020·Granted Apr 25, 2023·0 cites·14 claims
- 3256US2024258142A1Systems and methods for semiconductor wafer transportTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 3354US2022356578A1System and method for monitoring and performing thin film depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 3451US2023010438A1Semiconductor devices and methods of manufacturing thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →