Inventor · disambiguated record

Hsiulin Tsai

Also filed as: TSAI HSIULIN

3 granted patents·0 citations·filing 2018–2020

39Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD3

Top patents by PatentIndex Score

3 records

0152US11557476B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jan 17, 2023·0 cites·10 claims
0245US11211265B2Heat treatment apparatus and heat treatment methodTOKYO ELECTRON LTD·Filed 2019·Granted Dec 28, 2021·0 cites·12 claims
0342US10854449B2Method and apparatus for forming silicon filmTOKYO ELECTRON LTD·Filed 2018·Granted Dec 1, 2020·0 cites·16 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →