Inventor · disambiguated record
Hung Jui Chang
Also filed as: CHANG HUNG J · CHANG HUNG-JUI · CHANG HUNG-SHEN
33 granted patents·13 pending applications·57 citations·filing 2003–2025
95Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD25TAIWAN SEMICONDUCTOR MFG8CHICONY POWER TECH CO LTD5ACBEL POLYTECH INC1ACBEL POLYTECHINC1
Top patents by PatentIndex Score
46 records- 0194US10510516B2Moving focus ring for plasma etcherTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Dec 17, 2019·9 cites·20 claims
- 0293US10504738B2Focus ring for plasma etcherTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 10, 2019·7 cites·20 claims
- 0389US10998259B2Semiconductor device and method of manufactureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 4, 2021·4 cites·20 claims
- 0487US9368394B1Dry etching gas and method of manufacturing semiconductor deviceTAIWAN SEMICONDUCTOR MFG·Filed 2015·Granted Jun 14, 2016·6 cites·20 claims
- 0586US10566232B2Post-etch treatment of an electrically conductive featureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Feb 18, 2020·3 cites·20 claims
- 0685US11569125B2Etch profile control of interconnect structuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jan 31, 2023·1 cites·20 claims
- 0783US12300593B2Semiconductor device and method of manufactureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted May 13, 2025·0 cites·20 claims
- 0883US2025246528A1Semiconductor device and method of manufactureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0981US11195750B2Etch profile control of interconnect structuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 7, 2021·2 cites·20 claims
- 1080US10707123B2Etch profile control of interconnect structuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jul 7, 2020·2 cites·20 claims
- 1180US2023377963A1Etch profile control of interconnect structuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 1277US12266567B2Method of forming a barrier layer in an interconnect structure of semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Apr 1, 2025·0 cites·20 claims
- 1377US11128191B2Wire bonding device of stator of motorCHICONY POWER TECH CO LTD·Filed 2019·Granted Sep 21, 2021·2 cites·12 claims
- 1476US11854873B2Etch profile control of interconnect structuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 26, 2023·0 cites·20 claims
- 1575US11075087B2Focus ring for plasma etcherTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jul 27, 2021·1 cites·20 claims
- 1673US11810846B2Semiconductor device and method of manufactureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 7, 2023·0 cites·20 claims
- 1773US10529543B2Etch process with rotatable shower headTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jan 7, 2020·1 cites·20 claims
- 1870US9691809B2Backside illuminated image sensor device having an oxide film and method of forming an oxide film of a backside illuminated image sensor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jun 27, 2017·2 cites·20 claims
- 1968US2025242469A1Chemical Mechanical Polishing Pad Dresser and Manufacturing Method ThereofKINIK CO·Filed 2024·Application pending·0 cites
- 2067US11335593B2Interconnect structure of semiconductor device including barrier layer located entirely in viaTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 17, 2022·0 cites·20 claims
- 2167US7955993B2Oxygen plasma reduction to eliminate precursor overflow in BPTEOS film depositionTAIWAN SEMICONDUCTOR MFG·Filed 2009·Granted Jun 7, 2011·2 cites·18 claims
- 2263US9484207B2Semiconductor device structure and method for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Nov 1, 2016·1 cites·14 claims
- 2362US11004730B2Methods of forming conductive features using a vacuum environmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 11, 2021·0 cites·20 claims
- 2461US11227747B2Etch process with rotatable shower headTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 18, 2022·0 cites·20 claims
- 2561US9982340B2Shower head apparatus and method for controlling plasma or gas distributionLEE CHIH TSUNG·Filed 2012·Granted May 29, 2018·2 cites·17 claims
- 2661US7207339B2Method for cleaning a plasma enhanced CVD chamberTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Apr 24, 2007·7 cites·20 claims
- 2760US10847349B2Moving focus ring for plasma etcherTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Nov 24, 2020·0 cites·20 claims
- 2860US7283369B2Power supply with a safety deviceACBEL POLYTECHINC·Filed 2005·Granted Oct 16, 2007·3 cites·8 claims
- 2959US2020043740A1Focus ring for plasma etcherTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Application pending·0 cites
- 3058US10679891B2Methods of forming interconnect structures using a vacuum environmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jun 9, 2020·0 cites·20 claims
- 3158US8624394B2Integrated technology for partial air gap low K depositionCHANG HUNG JUI·Filed 2011·Granted Jan 7, 2014·2 cites·15 claims
- 3252US2007241459A1Devices having a cavity structure and related methodsTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
- 3351US8497183B2Devices having a cavity structure and related methodsCHOU YOU-HUA·Filed 2010·Granted Jul 30, 2013·0 cites·5 claims
- 3449US2015296636A1Electronic apparatus for solar power systemCHICONY POWER TECH CO LTD·Filed 2014·Application pending·0 cites
- 3548US2015003021A1Inverter moduleCHICONY POWER TECH CO LTD·Filed 2013·Application pending·0 cites
- 3646US10879051B2Method for controlling exposure region in bevel etching process for semiconductor fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Dec 29, 2020·0 cites·20 claims
- 3745US10190906B2Light sensor sensing illumination of a partial areaCHICONY POWER TECH CO LTD·Filed 2016·Granted Jan 29, 2019·0 cites·13 claims
- 3843US2005155625A1Chamber cleaning methodTAIWAN SEMICONDUCTOR MFG·Filed 2004·Application pending·0 cites
- 3943US2007205516A1Low-k dielectric layer, semiconductor device, and method for fabricating the sameTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
- 4042US2008174998A1Emergency lamp having energy-saving effectCHANG HUNG-SHEN·Filed 2007·Application pending·0 cites
- 4142US2008061343A1Metal-oxide-metal structure with improved capacitive coupling areaTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
- 4241US9196973B2Solar junction box and wire connecting structure thereofCHICONY POWER TECH CO LTD·Filed 2014·Granted Nov 24, 2015·0 cites·17 claims
- 4338US6935876B1Power supply releasing deviceACBEL POLYTECH INC·Filed 2004·Granted Aug 30, 2005·0 cites·9 claims
- 4438US2006292859A1Damascene process using dielectic layer containing fluorine and nitrogenTAIWAN SEMICONDUCTOR MFG·Filed 2005·Application pending·0 cites
- 4538US2005074554A1Method of forming inter-metal dielectric layer structureFiled 2003·Application pending·0 cites
- 4636US11031279B2Semiconductor device with reduced trench loading effectTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jun 8, 2021·0 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Hung Jui Chang files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →