Inventor · disambiguated record
Huutri Dao
Also filed as: DAO HUUTRI
2 granted patents·3 pending applications·17 citations·filing 2001–2014
56Inventor score
Top patents by PatentIndex Score
5 records- 0182US8475625B2Apparatus for etching high aspect ratio featuresPAMARTHY SHARMA·Filed 2006·Granted Jul 2, 2013·15 cites·22 claims
- 0258US9155184B2Plasma generation source employing dielectric conduit assemblies having removable interfaces and related assemblies and methodsAPPLIED MATERIALS INC·Filed 2014·Granted Oct 6, 2015·2 cites·20 claims
- 0339US2016099162A1Single ring design for high yield, substrate extreme edge defect reduction in icp plasma processing chamberAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 0434US2002144706A1Remote plasma cleaning of pumpstack components of a reactor chamberFiled 2001·Application pending·0 cites
- 0531US2002179247A1Nozzle for introduction of reactive species in remote plasma cleaning applicationsFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →