Inventor · disambiguated record
Hui Quan Lim
Also filed as: LIM HUI QUAN
2 granted patents·1 pending application·2 citations·filing 2021–2022
34Inventor score
Files withASML NETHERLANDS BV3
Top patents by PatentIndex Score
3 records- 0189US12276921B2Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology methodASML NETHERLANDS BV·Filed 2021·Granted Apr 15, 2025·2 cites·17 claims
- 0260US12436470B2Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology methodASML NETHERLANDS BV·Filed 2021·Granted Oct 7, 2025·0 cites·15 claims
- 0354US2024184215A1Metrology tool calibration method and associated metrology toolASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →