Inventor · disambiguated record
Huaichao Ma
Also filed as: Ma Huaichao
4 granted patents·4 citations·filing 2016–2020
60Inventor score
Top patents by PatentIndex Score
4 records- 0182US10640862B2Method for forming film and method for forming aluminum nitride filmBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2016·Granted May 5, 2020·2 cites·18 claims
- 0272US10643843B2Film forming method and aluminum nitride film forming method for semiconductor apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2017·Granted May 5, 2020·2 cites·20 claims
- 0355US11315768B2Loading apparatus and physical vapor deposition apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2018·Granted Apr 26, 2022·0 cites·18 claims
- 0441US11710624B2Sputtering methodBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2020·Granted Jul 25, 2023·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →