Inventor · disambiguated record
Hubert Adriaan Van Mierlo
Also filed as: SIPOS GISELA · VAN MIERLO HUBERT A · VAN MIERLO HUBERT ADRIAAN
7 granted patents·3 pending applications·41 citations·filing 2004–2011
83Inventor score
Top patents by PatentIndex Score
10 records- 0187US8476167B2Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatusVAN MIERLO HUBERT ADRIAAN·Filed 2011·Granted Jul 2, 2013·14 cites·13 claims
- 0286US7522263B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2005·Granted Apr 21, 2009·14 cites·20 claims
- 0371US8961694B2Plasma generator and method for cleaning an objectWIERINGA FOKKO PIETER·Filed 2007·Granted Feb 24, 2015·4 cites·20 claims
- 0470US8164077B2Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical elementWEDOWSKI MARCO·Filed 2009·Granted Apr 24, 2012·3 cites·33 claims
- 0569US7480028B2Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer programASML NETHERLANDS BV·Filed 2005·Granted Jan 20, 2009·3 cites·26 claims
- 0665US7781237B2Alignment marker and lithographic apparatus and device manufacturing method using the sameASML NETHERLANDS BV·Filed 2005·Granted Aug 24, 2010·2 cites·25 claims
- 0746US7177009B2Position determination method and lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Feb 13, 2007·1 cites·25 claims
- 0844US2007139855A1Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatusASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
- 0940US2007146658A1Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
- 1038US2005275841A1Alignment marker and lithographic apparatus and device manufacturing method using the sameASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →