Inventor · disambiguated record
Huifeng Zheng
Also filed as: ZHENG HUIFENG
2 granted patents·1 pending application·0 citations·filing 2017–2025
26Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0164US2025191926A1Carbon based depositions used for critical dimension control during high aspect ratio feature etches and for forming protective layersLAM RES CORP·Filed 2025·Application pending·0 cites
- 0260US12249514B2Carbon based depositions used for critical dimension control during high aspect ratio feature etches and for forming protective layersLAM RES CORP·Filed 2020·Granted Mar 11, 2025·0 cites·16 claims
- 0341US10090150B2Low dielectric constant (low-k) dielectric and method of forming the sameWISCONSIN ALUMNI RES FOUND·Filed 2017·Granted Oct 2, 2018·0 cites·29 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →