Inventor · disambiguated record
Hyung Je Woo
Also filed as: WOO HYUNG JE
5 granted patents·1 pending application·10 citations·filing 2012–2020
70Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0180US10103018B2Apparatus for treating substrateSEMES CO LTD·Filed 2013·Granted Oct 16, 2018·5 cites·12 claims
- 0278US11133212B2High temperature electrostatic chuckAPPLIED MATERIALS INC·Filed 2019·Granted Sep 28, 2021·2 cites·15 claims
- 0372US9496121B2Antenna units, substrate treating apparatuses including the same, and substrate treating methods using the apparatusesKIM HYUNG JOON·Filed 2012·Granted Nov 15, 2016·3 cites·19 claims
- 0452US11821082B2Reduced defect deposition processesAPPLIED MATERIALS INC·Filed 2020·Granted Nov 21, 2023·0 cites·19 claims
- 0540US2021159107A1Edge uniformity tunability on bipolar electrostatic chuckAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 0631US9978567B2Apparatus and method of treating a substrateSEMES CO LTD·Filed 2015·Granted May 22, 2018·0 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →