Inventor · disambiguated record
I-Kuan Lin
Also filed as: LIN I-KUAN
12 granted patents·4 pending applications·16 citations·filing 2012–2024
85Inventor score
Top patents by PatentIndex Score
16 records- 0190US8861170B2Electrostatic chuck with photo-patternable soft protrusion contact surfaceENTEGRIS INC·Filed 2012·Granted Oct 14, 2014·10 cites·25 claims
- 0282US2024337023A1Articles coated with a fluoro-annealed filmENTEGRIS INC·Filed 2024·Application pending·0 cites
- 0379US11713504B2Chemical resistant multi-layer coatings applied by atomic layer depositionENTEGRIS INC·Filed 2022·Granted Aug 1, 2023·0 cites·10 claims
- 0478US9644269B2Diffusion resistant electrostatic clampVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted May 9, 2017·3 cites·14 claims
- 0576US2025129485A1Coatings for enhancement of properties and performance of substrate articles and apparatusHENDRIX BRYAN C·Filed 2024·Application pending·0 cites
- 0674US10961617B2Articles coated with fluoro-annealed filmsENTEGRIS INC·Filed 2015·Granted Mar 30, 2021·1 cites·16 claims
- 0773US11390943B2Chemical resistant multi-layer coatings applied by atomic layer depositionENTEGRIS INC·Filed 2018·Granted Jul 19, 2022·0 cites·18 claims
- 0872US12084778B2Coatings for enhancement of properties and performance of substrate articles and apparatusENTEGRIS INC·Filed 2020·Granted Sep 10, 2024·0 cites·10 claims
- 0972US9721821B2Electrostatic chuck with photo-patternable soft protrusion contact surfaceENTEGRIS INC·Filed 2013·Granted Aug 1, 2017·2 cites·20 claims
- 1066US2018044800A1Coatings for enhancement of properties and performance of substrate articles and apparatusENTEGRIS INC·Filed 2016·Application pending·0 cites
- 1164US2018202047A1Articles coated with a fluoro-annealed filmENTEGRIS INC·Filed 2018·Application pending·0 cites
- 1262US12018382B2Coatings for enhancement of properties and performance of substrate articles and apparatusENTEGRIS INC·Filed 2018·Granted Jun 25, 2024·0 cites·3 claims
- 1356US10385454B2Diffusion resistant electrostatic clampVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Aug 20, 2019·0 cites·17 claims
- 1445US11728199B2Substrate support features and method of applicationASMPT NEXX INC·Filed 2019·Granted Aug 15, 2023·0 cites·18 claims
- 1539US10734270B2Vacuum chuck with polymeric embossmentsENTEGRIS INC·Filed 2014·Granted Aug 4, 2020·0 cites·9 claims
- 1632US10770330B2Wafer contact surface protrusion profile with improved particle performanceENTEGRIS INC·Filed 2017·Granted Sep 8, 2020·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →