Inventor · disambiguated record
Ichiju Satoh
Also filed as: SATOH ICHIJU
8 granted patents·2 pending applications·214 citations·filing 1997–2023
89Inventor score
Files withEBARA CORP10
Top patents by PatentIndex Score
10 records- 0195US6354907B1Polishing apparatus including attitude controller for turntable and/or wafer carrierEBARA CORP·Filed 2000·Granted Mar 12, 2002·58 cites·26 claims
- 0284US5951368APolishing apparatusEBARA CORP·Filed 1997·Granted Sep 14, 1999·34 cites·49 claims
- 0380US6322434B1Polishing apparatus including attitude controller for dressing apparatusEBARA CORP·Filed 2000·Granted Nov 27, 2001·25 cites·16 claims
- 0474US6212540B1Filter circuitEBARA CORP·Filed 1997·Granted Apr 3, 2001·28 cites·13 claims
- 0572US6437864B1Stage positioning deviceEBARA CORP·Filed 1998·Granted Aug 20, 2002·36 cites·16 claims
- 0668US6213737B1Damper device and turbomolecular pump with damper deviceEBARA CORP·Filed 1998·Granted Apr 10, 2001·23 cites·10 claims
- 0756US2024035514A1Bearing apparatus and laser apparatus comprising bearing apparatusEBARA CORP·Filed 2023·Application pending·0 cites
- 0851US11731241B2Substrate rotation device, substrate cleaning device, substrate processing device, and control method for substrate rotation deviceEBARA CORP·Filed 2019·Granted Aug 22, 2023·0 cites·12 claims
- 0949US6183342B1Polishing apparatusEBARA CORP·Filed 1999·Granted Feb 6, 2001·10 cites·11 claims
- 1033US2006042059A1Vibration isolation system for a vacuum chamberEBARA CORP·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →