Inventor · disambiguated record
Igor Kogan
Also filed as: KOGAN IGOR · KOGAN IGOR G
9 granted patents·337 citations·filing 1994–2012
92Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0190US6357143B2Method and apparatus for heating and cooling substratesAPPLIED MATERIALS INC·Filed 2001·Granted Mar 19, 2002·40 cites·40 claims
- 0286US6658763B2Method for heating and cooling substratesAPPLIED MATERIALS INC·Filed 2002·Granted Dec 9, 2003·27 cites·18 claims
- 0386US6276072B1Method and apparatus for heating and cooling substratesAPPLIED MATERIALS INC·Filed 1999·Granted Aug 21, 2001·58 cites·34 claims
- 0484US6477787B2Method and apparatus for heating and cooling substratesAPPLIED MATERIALS INC·Filed 2002·Granted Nov 12, 2002·22 cites·43 claims
- 0584US5810931AHigh aspect ratio clamp ringAPPLIED MATERIALS INC·Filed 1996·Granted Sep 22, 1998·78 cites·34 claims
- 0683US6929774B2Method and apparatus for heating and cooling substratesAPPLIED MATERIALS INC·Filed 2003·Granted Aug 16, 2005·19 cites·42 claims
- 0777US9177842B2Degassing apparatus adapted to process substrates in multiple tiers with second actuatorENGLHARDT ERIC A·Filed 2012·Granted Nov 3, 2015·5 cites·5 claims
- 0874US5885428AMethod and apparatus for both mechanically and electrostatically clamping a wafer to a pedestal within a semiconductor wafer processing systemAPPLIED MATERIALS INC·Filed 1996·Granted Mar 23, 1999·54 cites·10 claims
- 0963US5868847AClamp ring for shielding a substrate during film layer depositionAPPLIED MATERIALS INC·Filed 1994·Granted Feb 9, 1999·34 cites·14 claims
Join the waitlist — get patent alerts
Get an alert when Igor Kogan files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →