Inventor · disambiguated record
Iku Shiota
Also filed as: SHIOTA IKU
4 granted patents·95 citations·filing 1997–2000
79Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0183US6472711B1Semiconductor substrate and production method thereofCANON KK·Filed 2000·Granted Oct 29, 2002·34 cites·12 claims
- 0270US5956837AMethod of detaching object to be processed from electrostatic chuckTOKYO ELECTRON LTD·Filed 1997·Granted Sep 28, 1999·44 cites·9 claims
- 0347US6171932B1Semiconductor substrate and production method thereofCANON KK·Filed 1999·Granted Jan 9, 2001·13 cites·50 claims
- 0432US6479410B2Processing method for object to be processed including a pre-coating step to seal fluorineTOKYO ELECTRON LTD·Filed 1998·Granted Nov 12, 2002·4 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →