Inventor · disambiguated record
Iljo Kwak
Also filed as: KWAK ILJO
4 granted patents·3 pending applications·2 citations·filing 2017–2023
58Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0187US11495470B1Method of enhancing etching selectivity using a pulsed plasmaAPPLIED MATERIALS INC·Filed 2021·Granted Nov 8, 2022·2 cites·17 claims
- 0266US12080549B2Semiconductor structure with nanofog oxide adhered to inert or weakly reactive surfacesUNIV CALIFORNIA·Filed 2021·Granted Sep 3, 2024·0 cites·19 claims
- 0357US2025095984A1In-situ sidewall passivation toward the bottom of high aspect ratio featuresAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0456US2025022714A1Cyclic etch of silicon oxide and silicon nitrideAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0551US11127590B2Method for ALD deposition on inert surfaces via Al2O3 nanoparticlesUNIV CALIFORNIA·Filed 2017·Granted Sep 21, 2021·0 cites·17 claims
- 0651US2024096641A1In-situ carbon liner for high aspect ratio featuresAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 0733US10840350B2Nanolaminate structure, semiconductor device and method of forming nanolaminate structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Nov 17, 2020·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →