Inventor · disambiguated record
Ilya Perlov
Also filed as: PERLOV ILYA
47 granted patents·7 pending applications·8,201 citations·filing 1986–2009
99Inventor score
Top patents by PatentIndex Score
54 records- 0199US5964653ACarrier head with a flexible membrane for a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 1997·Granted Oct 12, 1999·194 cites·18 claims
- 0299US5738574AContinuous processing system for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 1995·Granted Apr 14, 1998·797 cites·41 claims
- 0399US5516367AChemical vapor deposition chamber with a purge guideAPPLIED MATERIALS INC·Filed 1994·Granted May 14, 1996·397 cites·47 claims
- 0499US5421893ASusceptor drive and wafer displacement mechanismAPPLIED MATERIALS INC·Filed 1993·Granted Jun 6, 1995·732 cites·27 claims
- 0599US5362526APlasma-enhanced CVD process using TEOS for depositing silicon oxideAPPLIED MATERIALS INC·Filed 1991·Granted Nov 8, 1994·484 cites·15 claims
- 0699US5000113AThermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized processAPPLIED MATERIALS INC·Filed 1986·Granted Mar 19, 1991·1.1k cites·19 claims
- 0799US4892753AProcess for PECVD of silicon oxide using TEOS decompositionAPPLIED MATERIALS INC·Filed 1988·Granted Jan 9, 1990·503 cites·12 claims
- 0899US4872947ACVD of silicon oxide using TEOS decomposition and in-situ planarization processAPPLIED MATERIALS INC·Filed 1988·Granted Oct 10, 1989·522 cites·14 claims
- 0998US6167834B1Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized processAPPLIED MATERIALS INC·Filed 1992·Granted Jan 2, 2001·367 cites·5 claims
- 1098US6146463AApparatus and method for aligning a substrate on a support memberAPPLIED MATERIALS INC·Filed 1998·Granted Nov 14, 2000·412 cites·8 claims
- 1198US5856240AChemical vapor deposition of a thin film onto a substrateAPPLIED MATERIALS INC·Filed 1994·Granted Jan 5, 1999·275 cites·18 claims
- 1298US5804507ARadially oscillating carousel processing system for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 1995·Granted Sep 8, 1998·243 cites·84 claims
- 1397US7614939B2Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motionAPPLIED MATERIALS INC·Filed 2007·Granted Nov 10, 2009·39 cites·6 claims
- 1497US6283692B1Apparatus for storing and moving a cassetteAPPLIED MATERIALS INC·Filed 1998·Granted Sep 4, 2001·474 cites·10 claims
- 1594US6468353B1Method and apparatus for improved substrate handlingAPPLIED MATERIALS INC·Filed 2000·Granted Oct 22, 2002·78 cites·11 claims
- 1694US5951770ACarousel wafer transfer systemAPPLIED MATERIALS INC·Filed 1997·Granted Sep 14, 1999·138 cites·26 claims
- 1794US5354715AThermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized processAPPLIED MATERIALS INC·Filed 1992·Granted Oct 11, 1994·132 cites·16 claims
- 1893US6896584B2Method of controlling carrier head with multiple chambersAPPLIED MATERIALS INC·Filed 2003·Granted May 24, 2005·29 cites·18 claims
- 1992US7255632B2Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motionAPPLIED MATERIALS INC·Filed 2006·Granted Aug 14, 2007·13 cites·11 claims
- 2092US5695568AChemical vapor deposition chamberAPPLIED MATERIALS INC·Filed 1994·Granted Dec 9, 1997·95 cites·22 claims
- 2190US7637707B2Apparatus for storing and moving a cassetteAPPLIED MATERIALS INC·Filed 2005·Granted Dec 29, 2009·16 cites·6 claims
- 2290US6648740B2Carrier head with a flexible membrane to form multiple chambersAPPLIED MATERIALS INC·Filed 2002·Granted Nov 18, 2003·22 cites·18 claims
- 2390US5755886AApparatus for preventing deposition gases from contacting a selected region of a substrate during deposition processingAPPLIED MATERIALS INC·Filed 1995·Granted May 26, 1998·91 cites·28 claims
- 2489US6103014AChemical vapor deposition chamberAPPLIED MATERIALS INC·Filed 1996·Granted Aug 15, 2000·62 cites·15 claims
- 2589US6086457AWashing transfer station in a system for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 1999·Granted Jul 11, 2000·71 cites·24 claims
- 2689US6082951AWafer cassette load stationAPPLIED MATERIALS INC·Filed 1998·Granted Jul 4, 2000·104 cites·26 claims
- 2789US5935338AChemical vapor deposition chamberAPPLIED MATERIALS INC·Filed 1996·Granted Aug 10, 1999·63 cites·11 claims
- 2888US6575737B1Method and apparatus for improved substrate handlingAPPLIED MATERIALS INC·Filed 2000·Granted Jun 10, 2003·45 cites·9 claims
- 2988US6293853B1Conditioner apparatus for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2000·Granted Sep 25, 2001·26 cites·15 claims
- 3088US6287386B1Carousel wafer transfer systemAPPLIED MATERIALS INC·Filed 1999·Granted Sep 11, 2001·77 cites·19 claims
- 3188USRE36623EProcess for PECVD of silicon oxide using TEOS decompositionAPPLIED MATERIALS INC·Filed 1996·Granted Mar 21, 2000·79 cites·13 claims
- 3287US8079894B2Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motionTOLLES ROBERT D·Filed 2009·Granted Dec 20, 2011·11 cites·6 claims
- 3387US6277010B1Carrier head with a flexible membrane for a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 2000·Granted Aug 21, 2001·18 cites·10 claims
- 3487US6126517ASystem for chemical mechanical polishing having multiple polishing stationsAPPLIED MATERIALS INC·Filed 1998·Granted Oct 3, 2000·63 cites·52 claims
- 3586US5871811AMethod for protecting against deposition on a selected region of a substrateAPPLIED MATERIALS INC·Filed 1995·Granted Feb 16, 1999·69 cites·45 claims
- 3685US6506104B2Carrier head with a flexible membraneAPPLIED MATERIALS INC·Filed 2001·Granted Jan 14, 2003·16 cites·15 claims
- 3785US5882419AChemical vapor deposition chamberAPPLIED MATERIALS INC·Filed 1997·Granted Mar 16, 1999·46 cites·20 claims
- 3884US6080046AUnderwater wafer storage and wafer picking for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 1998·Granted Jun 27, 2000·49 cites·26 claims
- 3982US7097544B1Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motionAPPLIED MATERIALS INC·Filed 2000·Granted Aug 29, 2006·18 cites·30 claims
- 4082US6143127ACarrier head with a retaining ring for a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 1998·Granted Nov 7, 2000·51 cites·10 claims
- 4180US6374508B1Apparatus and method for aligning a substrate on a support memberAPPLIED MATERIALS INC·Filed 2000·Granted Apr 23, 2002·20 cites·22 claims
- 4279US6036583AConditioner head in a substrate polisher and methodAPPLIED MATERIALS INC·Filed 1997·Granted Mar 14, 2000·39 cites·11 claims
- 4378US6393337B1Method and apparatus for orienting substratesAPPLIED MATERIALS INC·Filed 2000·Granted May 21, 2002·18 cites·20 claims
- 4477US5931724AMechanical fastener to hold a polishing pad on a platen in a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 1997·Granted Aug 3, 1999·40 cites·18 claims
- 4577US5893795AApparatus for moving a cassetteAPPLIED MATERIALS INC·Filed 1997·Granted Apr 13, 1999·50 cites·10 claims
- 4674US7238090B2Polishing apparatus having a troughAPPLIED MATERIALS INC·Filed 2004·Granted Jul 3, 2007·10 cites·5 claims
- 4753US6532866B2Method and apparatus for orienting substratesAPPLIED MATERIALS INC·Filed 2002·Granted Mar 18, 2003·3 cites·9 claims
- 4850US2005142995A1Method of controlling carrier head with multiple chambersFiled 2005·Application pending·0 cites
- 4941US2002170672A1Method and apparatus for improved substrate handlingFiled 2002·Application pending·0 cites
- 5038US2001043849A1Apparatus for storing and moving a cassetteFiled 2001·Application pending·0 cites
Showing the top 50 of 54 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →