Inventor · disambiguated record
Indrajit Lahiri
Also filed as: LAHIRI INDRAJIT
6 granted patents·3 pending applications·118 citations·filing 1997–2024
85Inventor score
Top patents by PatentIndex Score
9 records- 0189US7582167B2Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate supportAPPLIED MATERIALS INC·Filed 2007·Granted Sep 1, 2009·15 cites·5 claims
- 0289US7276447B1Plasma dielectric etch process including ex-situ backside polymer removal for low-dielectric constant materialAPPLIED MATERIALS INC·Filed 2006·Granted Oct 2, 2007·24 cites·18 claims
- 0379US8083963B2Removal of process residues on the backside of a substrateDELGADINO GERARDO A·Filed 2007·Granted Dec 27, 2011·10 cites·24 claims
- 0479US7107125B2Method and apparatus for monitoring the position of a semiconductor processing robotAPPLIED MATERIALS INC·Filed 2003·Granted Sep 12, 2006·19 cites·19 claims
- 0569US5900935AHomodyne interferometer and method of sensing materialFiled 1997·Granted May 4, 1999·43 cites·24 claims
- 0662US7279049B2Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate supportAPPLIED MATERIALS INC·Filed 2004·Granted Oct 9, 2007·7 cites·13 claims
- 0761US2025248272A1Oled color patterning based on photolithography and chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0848US2006224276A1Method for monitoring the position of a semiconductor processing robotYIM PYONGWON·Filed 2006·Application pending·0 cites
- 0946US2010145513A1Method for monitoring the position of a semiconductor processing robotAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →