Inventor · disambiguated record
Inna Steely-Tarshish
Also filed as: STEELY-TARSHISH INNA
6 granted patents·9 citations·filing 2020–2023
73Inventor score
Files withKLA CORP6
Top patents by PatentIndex Score
6 records- 0194US11209737B1Performance optimized scanning sequence for eBeam metrology and inspectionKLA CORP·Filed 2020·Granted Dec 28, 2021·5 cites·24 claims
- 0292US11862524B2Overlay mark design for electron beam overlayKLA CORP·Filed 2021·Granted Jan 2, 2024·2 cites·20 claims
- 0387US11809090B2Composite overlay metrology targetKLA CORP·Filed 2020·Granted Nov 7, 2023·2 cites·49 claims
- 0480US12055859B2Overlay mark design for electron beam overlayKLA CORP·Filed 2023·Granted Aug 6, 2024·0 cites·15 claims
- 0570US11703767B2Overlay mark design for electron beam overlayKLA CORP·Filed 2021·Granted Jul 18, 2023·0 cites·10 claims
- 0656US11720031B2Overlay design for electron beam and scatterometry overlay measurementsKLA CORP·Filed 2021·Granted Aug 8, 2023·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →