Inventor · disambiguated record
Isaac Millan
Also filed as: MILLAN ISAAC
11 granted patents·323 citations·filing 2005–2010
93Inventor score
Files withBUCHBERGER JR DOUGLAS A4ADVANCED THERMAL SCIENCES CORP3BRILLHART PAUL LUKAS3APPLIED MATERIALS INC1
Top patents by PatentIndex Score
11 records- 0198US7415835B2Thermal control system and methodADVANCED THERMAL SCIENCES CORP·Filed 2006·Granted Aug 26, 2008·119 cites·8 claims
- 0298US7178353B2Thermal control system and methodADVANCED THERMAL SCIENCES CORP·Filed 2005·Granted Feb 20, 2007·79 cites·30 claims
- 0396US8092639B2Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changesBUCHBERGER JR DOUGLAS A·Filed 2010·Granted Jan 10, 2012·20 cites·7 claims
- 0495US7765820B2Thermal control system and methodADVANCED THERMAL SCIENCES CORP·Filed 2008·Granted Aug 3, 2010·29 cites·36 claims
- 0593US8329586B2Method of processing a workpiece in a plasma reactor using feed forward thermal controlBUCHBERGER JR DOUGLAS A·Filed 2010·Granted Dec 11, 2012·11 cites·18 claims
- 0693US8221580B2Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loopsBUCHBERGER JR DOUGLAS A·Filed 2006·Granted Jul 17, 2012·14 cites·18 claims
- 0792US8980044B2Plasma reactor with a multiple zone thermal control feed forward control apparatusBRILLHART PAUL LUKAS·Filed 2010·Granted Mar 17, 2015·10 cites·19 claims
- 0892US8337660B2Capacitively coupled plasma reactor having very agile wafer temperature controlBUCHBERGER JR DOUGLAS A·Filed 2010·Granted Dec 25, 2012·12 cites·13 claims
- 0991US7988872B2Method of operating a capacitively coupled plasma reactor with dual temperature control loopsAPPLIED MATERIALS INC·Filed 2006·Granted Aug 2, 2011·19 cites·20 claims
- 1087US8546267B2Method of processing a workpiece in a plasma reactor using multiple zone feed forward thermal controlBRILLHART PAUL LUKAS·Filed 2010·Granted Oct 1, 2013·5 cites·7 claims
- 1182US8801893B2Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactorBRILLHART PAUL LUKAS·Filed 2010·Granted Aug 12, 2014·5 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →