Inventor · disambiguated record
Itay Gdor
Also filed as: GDOR ITAY
9 granted patents·8 pending applications·15 citations·filing 2020–2024
79Inventor score
Files withKLA CORP17
Top patents by PatentIndex Score
17 records- 0196US11796925B2Scanning overlay metrology using overlay targets having multiple spatial frequenciesKLA CORP·Filed 2022·Granted Oct 24, 2023·6 cites·22 claims
- 0293US11378394B1On-the-fly scatterometry overlay metrology targetKLA CORP·Filed 2020·Granted Jul 5, 2022·7 cites·24 claims
- 0387US11409205B2Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devicesKLA CORP·Filed 2020·Granted Aug 9, 2022·2 cites·22 claims
- 0477US2024337953A1System and method for tracking real-time position for scanning overlay metrologyKLA CORP·Filed 2023·Application pending·0 cites
- 0572US2024337952A1System and method for determining overlay measurement of a scanning targetKLA CORP·Filed 2023·Application pending·0 cites
- 0665US2025297955A1Scanning diffraction based overlay scatterometryKLA CORP·Filed 2024·Application pending·0 cites
- 0763US12373936B2System and method for overlay metrology using a phase maskKLA CORP·Filed 2023·Granted Jul 29, 2025·0 cites·38 claims
- 0862US2025328087A1System and method for determining overlay measurement of a scanning target using multiple wavelengthsKLA CORP·Filed 2024·Application pending·0 cites
- 0960US12504697B2Single grab pupil landscape via broadband illuminationKLA CORP·Filed 2023·Granted Dec 23, 2025·0 cites·20 claims
- 1058US12487190B2System and method for isolation of specific fourier pupil frequency in overlay metrologyKLA CORP·Filed 2022·Granted Dec 2, 2025·0 cites·26 claims
- 1158US12105414B2Targets for diffraction-based overlay error metrologyKLA CORP·Filed 2022·Granted Oct 1, 2024·0 cites·16 claims
- 1258US2024302751A1Multi-overlay stacked grating metrology targetKLA CORP·Filed 2023·Application pending·0 cites
- 1357US2024068804A1Multi-pitch grid overlay target for scanning overlay metrologyKLA CORP·Filed 2023·Application pending·0 cites
- 1457US2024167813A1System and method for suppression of tool induced shift in scanning overlay metrologyKLA CORP·Filed 2023·Application pending·0 cites
- 1555US2025314482A1Focus position measurement while scanningKLA CORP·Filed 2024·Application pending·0 cites
- 1653US12422363B2Scanning scatterometry overlay metrologyKLA CORP·Filed 2022·Granted Sep 23, 2025·0 cites·51 claims
- 1751US12105431B2Annular apodizer for small target overlay measurementKLA CORP·Filed 2022·Granted Oct 1, 2024·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →