Inventor · disambiguated record
Iwao Toshihiko
Also filed as: TOSHIHIKO IWAO
2 granted patents·1 pending application·0 citations·filing 2013–2013
20Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0142US2014262040A1Method and system using plasma tuning rods for plasma processingTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0239US9728416B2Plasma tuning rods in microwave resonator plasma sourcesTOKYO ELECTRON LTD·Filed 2013·Granted Aug 8, 2017·0 cites·20 claims
- 0339US9396955B2Plasma tuning rods in microwave resonator processing systemsTOKYO ELECTRON LTD·Filed 2013·Granted Jul 19, 2016·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →