Inventor · disambiguated record
J. Casey Donaher
Also filed as: DONAHER J CASEY
7 granted patents·5 pending applications·29 citations·filing 1994–2021
79Inventor score
Files withONTO INNOVATION INC6DONAHER J CASEY2RUDOLPH TECHNOLOGIES INC2MRS TECHNOLOGY INC1RUDOLPH TECH INC1
Top patents by PatentIndex Score
12 records- 0187US8395783B2System metrology coreDONAHER J CASEY·Filed 2010·Granted Mar 12, 2013·10 cites·38 claims
- 0275US11126096B2System and method for optimizing a lithography exposure processONTO INNOVATION INC·Filed 2018·Granted Sep 21, 2021·1 cites·36 claims
- 0370US11531279B2System and method for optimizing a lithography exposure processONTO INNOVATION INC·Filed 2021·Granted Dec 20, 2022·0 cites·15 claims
- 0468US8760624B2System and method for estimating field curvatureDONAHER J CASEY·Filed 2010·Granted Jun 24, 2014·2 cites·21 claims
- 0559US5483345AAlignment system for use in lithography utilizing a spherical reflector having a centered etched-on projection objectMRS TECHNOLOGY INC·Filed 1994·Granted Jan 9, 1996·16 cites·16 claims
- 0653US2023043353A1Multiple camera apparatus for photolithographic processingONTO INNOVATION INC·Filed 2021·Application pending·0 cites
- 0752US2015234281A1Blade for Substrate Edge Protection During PhotolithographyRUDOLPH TECHNOLOGIES INC·Filed 2013·Application pending·0 cites
- 0849US2015277239A1Multiple-Blade Device for Substrate Edge Protection during PhotolithographyRUDOLPH TECHNOLOGIES INC·Filed 2013·Application pending·0 cites
- 0940US11353800B2Conformal stageONTO INNOVATION INC·Filed 2018·Granted Jun 7, 2022·0 cites·28 claims
- 1040US9625832B2Planar motor system with increased efficiencyRUDOLPH TECH INC·Filed 2013·Granted Apr 18, 2017·0 cites·12 claims
- 1139US2020333713A1Separated axis lithographic toolONTO INNOVATION INC·Filed 2018·Application pending·0 cites
- 1237US2020286764A1High resolution stage positionerONTO INNOVATION INC·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →