Inventor · disambiguated record
Jaakko Anttila
Also filed as: ANTTILA JAAKKO
15 granted patents·1 pending application·169 citations·filing 2013–2024
92Inventor score
Files withASM IP HOLDING BV16
Top patents by PatentIndex Score
16 records- 0197US12129545B2Precursor capsule, a vessel and a methodASM IP HOLDING BV·Filed 2021·Granted Oct 29, 2024·2 cites·22 claims
- 0297US10115603B2Removal of surface passivationASM IP HOLDING BV·Filed 2016·Granted Oct 30, 2018·48 cites·9 claims
- 0397US9490145B2Removal of surface passivationASM IP HOLDING BV·Filed 2015·Granted Nov 8, 2016·78 cites·21 claims
- 0496US10741411B2Removal of surface passivationASM IP HOLDING BV·Filed 2018·Granted Aug 11, 2020·19 cites·19 claims
- 0592US9412602B2Deposition of smooth metal nitride filmsASM IP HOLDING BV·Filed 2013·Granted Aug 9, 2016·12 cites·21 claims
- 0691US11062914B2Removal of surface passivationASM IP HOLDING BV·Filed 2020·Granted Jul 13, 2021·2 cites·20 claims
- 0789US10002936B2Titanium aluminum and tantalum aluminum thin filmsASM IP HOLDING BV·Filed 2015·Granted Jun 19, 2018·4 cites·22 claims
- 0885US2025092517A1Precursor capsule, a vessel and a methodASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0980US9704716B2Deposition of smooth metal nitride filmsASM IP HOLDING BV·Filed 2016·Granted Jul 11, 2017·2 cites·23 claims
- 1078US10636889B2Titanium aluminum and tantalum aluminum thin filmsASM IP HOLDING BV·Filed 2018·Granted Apr 28, 2020·1 cites·20 claims
- 1177US12237392B2Titanium aluminum and tantalum aluminum thin filmsASM IP HOLDING BV·Filed 2021·Granted Feb 25, 2025·0 cites·16 claims
- 1274US10074541B2Deposition of smooth metal nitride filmsASM IP HOLDING BV·Filed 2017·Granted Sep 11, 2018·1 cites·20 claims
- 1373US11139383B2Titanium aluminum and tantalum aluminum thin filmsASM IP HOLDING BV·Filed 2020·Granted Oct 5, 2021·0 cites·20 claims
- 1463US11646194B2Methods for forming silicon nitride thin filmsASM IP HOLDING BV·Filed 2020·Granted May 9, 2023·0 cites·16 claims
- 1554US10573511B2Methods for forming silicon nitride thin filmsASM IP HOLDING BV·Filed 2013·Granted Feb 25, 2020·0 cites·14 claims
- 1647US11421321B2Apparatuses for thin film depositionASM IP HOLDING BV·Filed 2015·Granted Aug 23, 2022·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →