Inventor · disambiguated record
James A. Folta
Also filed as: FOLTA JAMES · FOLTA JAMES A · FOLTA JAMES ALLEN
16 granted patents·3 pending applications·664 citations·filing 1995–2018
95Inventor score
Top patents by PatentIndex Score
19 records- 0190US6844272B2Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layersEUV LLC·Filed 2002·Granted Jan 18, 2005·40 cites·19 claims
- 0290US6056331AZero dead volume tube to surface sealUNIV CALIFORNIA·Filed 1996·Granted May 2, 2000·68 cites·14 claims
- 0389US6780496B2Optimized capping layers for EUV multilayersEUV LLC·Filed 2002·Granted Aug 24, 2004·43 cites·20 claims
- 0488US7062348B1Dynamic mask for producing uniform or graded-thickness thin filmsEXTREME ULTAVIOLET LITHOGRAPHY·Filed 2000·Granted Jun 13, 2006·45 cites·8 claims
- 0587US5644395AMiniaturized flow injection analysis systemUNIV CALIFORNIA·Filed 1995·Granted Jul 1, 1997·83 cites·17 claims
- 0686US6425988B1Method and system using power modulation for maskless vapor deposition of spatially graded thin film and multilayer coatings with atomic-level precision and accuracyFiled 2000·Granted Jul 30, 2002·26 cites·14 claims
- 0785US6134049AMethod to adjust multilayer film stress induced deformation of opticsUNIV CALIFORNIA·Filed 1998·Granted Oct 17, 2000·71 cites·23 claims
- 0884US6668207B1Method and system using power modulation and velocity modulation producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradientsUSA·Filed 2000·Granted Dec 23, 2003·24 cites·50 claims
- 0979US6849859B2Fabrication of precision optics using an imbedded reference surfaceEUV LLC·Filed 2001·Granted Feb 1, 2005·20 cites·31 claims
- 1079US6634760B2Low-cost method for producing extreme ultraviolet lithography opticsUNIV CALIFORNIA·Filed 2001·Granted Oct 21, 2003·21 cites·15 claims
- 1175US5609608AMiniature plastic gripper and fabrication methodUNIV CALIFORNIA·Filed 1995·Granted Mar 11, 1997·186 cites·19 claims
- 1266US6562404B1Conformal chemically resistant coatings for microflow devicesUNIV CALIFORNIA·Filed 2000·Granted May 13, 2003·7 cites·3 claims
- 1365US10901121B2Planarization of optical substratesL LIVERMORE NAT SECURITY LLC·Filed 2018·Granted Jan 26, 2021·0 cites·18 claims
- 1464US6524449B1Method and system for producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradientsFiled 1999·Granted Feb 25, 2003·21 cites·47 claims
- 1556US7473301B2Adhesive particle shieldingEUV LLC·Filed 2002·Granted Jan 6, 2009·5 cites·23 claims
- 1639US2003008148A1Optimized capping layers for EUV multilayersFiled 2001·Application pending·0 cites
- 1738US2004100638A1Correcting surface contour of a non-rigid object through control of surface residual stressUNIV CALIFORNIA·Filed 2002·Application pending·0 cites
- 1836US2004055871A1Use of ion beams for protecting substrates from particulate defect contamination in ultra-low-defect coating processesUNIV CALIFORNIA·Filed 2002·Application pending·0 cites
- 1929US5783130AFabrication method for miniature plastic gripperUNIV CALIFORNIA·Filed 1996·Granted Jul 21, 1998·4 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →