Inventor · disambiguated record
James M. E. Harper
Also filed as: HARPER JAMES M · HARPER JAMES M E · HARPER JAMES MCKELL EDWIN
53 granted patents·1 pending application·2,988 citations·filing 1977–2008
99Inventor score
Top patents by PatentIndex Score
54 records- 0199US5911619AApparatus for electrochemical mechanical planarizationIBM·Filed 1997·Granted Jun 15, 1999·400 cites·20 claims
- 0298US6181012B1Copper interconnection structure incorporating a metal seed layerIBM·Filed 1998·Granted Jan 30, 2001·335 cites·30 claims
- 0398US5807165AMethod of electrochemical mechanical planarizationIBM·Filed 1997·Granted Sep 15, 1998·476 cites·7 claims
- 0496US4259145AIon source for reactive ion etchingIBM·Filed 1979·Granted Mar 31, 1981·47 cites·7 claims
- 0595US6399496B1Copper interconnection structure incorporating a metal seed layerIBM·Filed 2000·Granted Jun 4, 2002·94 cites·21 claims
- 0695US4523971AProgrammable ion beam patterning systemIBM·Filed 1984·Granted Jun 18, 1985·75 cites·18 claims
- 0793US5706067AReflective spatial light modulator arrayIBM·Filed 1997·Granted Jan 6, 1998·138 cites·19 claims
- 0893US4446403ACompact plug connectable ion sourceIBM·Filed 1982·Granted May 1, 1984·43 cites·8 claims
- 0992US6063506ACopper alloys for chip and package interconnectionsIBM·Filed 1998·Granted May 16, 2000·116 cites·59 claims
- 1092US4132614AEtching by sputtering from an intermetallic target to form negative metallic ions which produce etching of a juxtaposed substrateIBM·Filed 1977·Granted Jan 2, 1979·33 cites·29 claims
- 1190US6323130B1Method for self-aligned formation of silicide contacts using metal silicon alloys for limited silicon consumption and for reduction of bridgingIBM·Filed 2000·Granted Nov 27, 2001·59 cites·16 claims
- 1290US4419203AApparatus and method for neutralizing ion beamsIBM·Filed 1982·Granted Dec 6, 1983·37 cites·8 claims
- 1390US4250009AEnergetic particle beam deposition systemIBM·Filed 1979·Granted Feb 10, 1981·57 cites·13 claims
- 1489US6444578B1Self-aligned silicide process for reduction of Si consumption in shallow junction and thin SOI electronic devicesIBM·Filed 2001·Granted Sep 3, 2002·50 cites·50 claims
- 1588US6440851B1Method and structure for controlling the interface roughness of cobalt disilicideIBM·Filed 1999·Granted Aug 27, 2002·57 cites·24 claims
- 1688US4381453ASystem and method for deflecting and focusing a broad ion beamIBM·Filed 1980·Granted Apr 26, 1983·30 cites·17 claims
- 1788US4351712ALow energy ion beam oxidation processIBM·Filed 1980·Granted Sep 28, 1982·67 cites·12 claims
- 1887US5828131ALow temperature formation of low resistivity titanium silicideIBM·Filed 1996·Granted Oct 27, 1998·60 cites·6 claims
- 1987US5130274ACopper alloy metallurgies for VLSI interconnection structuresIBM·Filed 1991·Granted Jul 14, 1992·97 cites·14 claims
- 2086US6150723ACopper stud structure with refractory metal linerIBM·Filed 1997·Granted Nov 21, 2000·71 cites·20 claims
- 2186US6090710AMethod of making copper alloys for chip and package interconnectionsIBM·Filed 1997·Granted Jul 18, 2000·73 cites·16 claims
- 2285US5422621AOriented granular giant magnetoresistance sensorIBM·Filed 1993·Granted Jun 6, 1995·32 cites·28 claims
- 2385US5243222ACopper alloy metallurgies for VLSI interconnection structuresIBM·Filed 1992·Granted Sep 7, 1993·83 cites·7 claims
- 2484US6300236B1Copper stud structure with refractory metal linerIBM·Filed 2000·Granted Oct 9, 2001·33 cites·8 claims
- 2581US6413859B1Method and structure for retarding high temperature agglomeration of silicides using alloysIBM·Filed 2000·Granted Jul 2, 2002·26 cites·3 claims
- 2681US5510295AMethod for lowering the phase transformation temperature of a metal silicideIBM·Filed 1993·Granted Apr 23, 1996·47 cites·31 claims
- 2780US7271486B2Retarding agglomeration of Ni monosilicide using Ni alloysIBM·Filed 2005·Granted Sep 18, 2007·7 cites·17 claims
- 2880US6331486B1Method and structure for reduction of contact resistance of metal silicides using a metal-germanium alloyIBM·Filed 2000·Granted Dec 18, 2001·21 cites·22 claims
- 2978US5565236AMethod of forming a giant magnetoresistance sensorIBM·Filed 1995·Granted Oct 15, 1996·28 cites·8 claims
- 3075US7384868B2Reduction of silicide formation temperature on SiGe containing substratesIBM·Filed 2003·Granted Jun 10, 2008·18 cites·18 claims
- 3174US6424388B1Reflective spatial light modulator arrayIBM·Filed 1998·Granted Jul 23, 2002·47 cites·26 claims
- 3273US6753606B2Method and structure for reduction of contact resistance of metal silicides using a metal-germanium alloyIBM·Filed 2001·Granted Jun 22, 2004·13 cites·11 claims
- 3373US5912506AMulti-layer metal sandwich with taper and reduced etch bias and method for forming sameIBM·Filed 1997·Granted Jun 15, 1999·42 cites·12 claims
- 3473US4379218AFluxless ion beam soldering processIBM·Filed 1981·Granted Apr 5, 1983·33 cites·8 claims
- 3566US6905560B2Retarding agglomeration of Ni monosilicide using Ni alloysIBM·Filed 2002·Granted Jun 14, 2005·10 cites·33 claims
- 3665US4424104ASingle axis combined ion and vapor sourceIBM·Filed 1983·Granted Jan 3, 1984·18 cites·9 claims
- 3760US5143867AMethod for depositing interconnection metallurgy using low temperature alloy processesIBM·Filed 1991·Granted Sep 1, 1992·31 cites·34 claims
- 3860US4538067ASingle grid focussed ion beam sourceIBM·Filed 1982·Granted Aug 27, 1985·10 cites·23 claims
- 3956US7081676B2Structure for controlling the interface roughness of cobalt disilicideIBM·Filed 2003·Granted Jul 25, 2006·5 cites·8 claims
- 4055US5634973ALow temperature selective growth of silicon or silicon alloysIBM·Filed 1996·Granted Jun 3, 1997·13 cites·6 claims
- 4153US6503641B2Interconnects with Ti-containing linersIBM·Filed 2000·Granted Jan 7, 2003·5 cites·13 claims
- 4251US8125082B2Reduction of silicide formation temperature on SiGe containing substratesCABRAL JR CYRIL·Filed 2008·Granted Feb 28, 2012·0 cites·7 claims
- 4351US7102234B2Method and structure for reduction of contact resistance of metal silicides using a metal-germanium alloyIBM·Filed 2004·Granted Sep 5, 2006·3 cites·7 claims
- 4449US6187679B1Low temperature formation of low resistivity titanium silicideIBM·Filed 1997·Granted Feb 13, 2001·9 cites·14 claims
- 4547US6809030B2Method and structure for controlling the interface roughness of cobalt disilicideIBM·Filed 2002·Granted Oct 26, 2004·2 cites·9 claims
- 4647US5401677AMethod of metal silicide formation in integrated circuit devicesIBM·Filed 1993·Granted Mar 28, 1995·12 cites·6 claims
- 4739US4264813AHigh intensity ion source using ionic conductorsIBM·Filed 1979·Granted Apr 28, 1981·4 cites·3 claims
- 4837US2002151158A1Method and structure for retarding high temperature agglomeration of silicides using alloysIBM·Filed 2002·Application pending·0 cites
- 4936US7468766B1Reflective spatial light modulator array including a light blocking layerIBM·Filed 1997·Granted Dec 23, 2008·6 cites·46 claims
- 5035US5418188AMethod for controlled positioning of a compound layer in a multilayer deviceIBM·Filed 1991·Granted May 23, 1995·7 cites·24 claims
Showing the top 50 of 54 patent records by PatentIndex Score.
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